Title :

Dispersion of confined acoustic phonons in ultra-thin Si membranes

Author(s) :

Cuffe, J. [Auteur]
Chavez, E. [Auteur]
Chapuis, P.O. [Auteur]
El Boudouti, E.H. [Auteur]
Alzina, F. [Auteur]
Dudek, D. [Auteur]
Pennec, Yan [Auteur]
Physique - IEMN [PHYSIQUE - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Djafari-Rouhani, Bahram [Auteur]
Physique - IEMN [PHYSIQUE - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Shchepetov, A. [Auteur]
Prunnila, M. [Auteur]
Ahopelto, J. [Auteur]
Sotomayor Torres, C.M. [Auteur]

Conference title :

1st International Conference on Phononic Crystals, Metamaterials and Optomechanics, PHONONICS 2011

City :

Santa Fe

Country :

Etats-Unis d'Amérique

Start date of the conference :

2011

Book title :

Proceedings of 1st International Conference on Phononic Crystals, Metamaterials and Optomechanics, PHONONICS 2011

Publication date :

2011

HAL domain(s) :

Physique [physics]

English abstract : [en]

The acoustic phonon dispersion curves of ~10 and ~30 nm Si membranes were measured using Brillouin Light Scattering (BLS) spectroscopy. The dispersion relations of the confined phonons were calculated from a semi-analytical ...
Show more >The acoustic phonon dispersion curves of ~10 and ~30 nm Si membranes were measured using Brillouin Light Scattering (BLS) spectroscopy. The dispersion relations of the confined phonons were calculated from a semi-analytical model based on continuum elasticity theory. Green’s function simulations were used to simulate both the phonon density of states and Brillouin spectra of the membranes. The effect of the native oxide layer was also considered, and found to affect significantly the dispersion of the higher order modes.Show less >

Language :

Anglais

Peer reviewed article :

Oui

Audience :

Internationale

Popular science :

Non

Collections :

• Institut d'Électronique, de Microélectronique et de Nanotechnologie (IEMN) - UMR 8520

Source :

Harvested from HAL