SU-8 photoresist and SU-8 based nanocomposites ...
Document type :
Article dans une revue scientifique: Article original
Title :
SU-8 photoresist and SU-8 based nanocomposites for broadband acoustical matching at 1 GHz
Author(s) :
Ndieguene, Assane [Auteur]
Campistron, Pierre [Auteur]
Carlier, Julien [Auteur]
Matériaux et Acoustiques pour MIcro et NAno systèmes intégrés - IEMN [MAMINA - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Wang, S. [Auteur]
Debavelaere-Callens, Dorothée [Auteur]
Nongaillard, Bertrand [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Campistron, Pierre [Auteur]

Carlier, Julien [Auteur]

Matériaux et Acoustiques pour MIcro et NAno systèmes intégrés - IEMN [MAMINA - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Wang, S. [Auteur]
Debavelaere-Callens, Dorothée [Auteur]
Nongaillard, Bertrand [Auteur]

Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Journal title :
Journal of Physics: Conference Series
Pages :
012005-1-8
Publisher :
IOP Science
Publication date :
2009
ISSN :
1742-6588
HAL domain(s) :
Sciences de l'ingénieur [physics]
English abstract : [en]
So as to integrate acoustic functions in BioMEMS using 1 GHz ZnO transducers deposited on silicon substrates, acoustic waves propagation through the silicon substrate and its transmission in water needs to be maximized ...
Show more >So as to integrate acoustic functions in BioMEMS using 1 GHz ZnO transducers deposited on silicon substrates, acoustic waves propagation through the silicon substrate and its transmission in water needs to be maximized (the insertion losses at the Si / water interface are about 6dB). In the context of integration, it is interesting for mechanical impedance matching to use photosensitive materials such as SU-8 so that patterns may be obtained. Nanocomposite materials based on SU-8 mixed with nanoparticles having adequate impedances were fabricated. These new materials are characterized in terms of their acoustic velocity, impedance and attenuation. For this, the nanocomposite layers are deposited on the substrate by spin coating to obtain a thickness of about 10 μm, in order to separate acoustic echoes from the material (even if λ/4 layer thickness is lower than 1 μm). The insertion losses of the device immersed in water can be simulated as a function of frequency for a given reflection coefficient between the silicon substrate and the photoresist. The characteristics of some nanocomposites made with SU-8 and various concentrations of nanoparticles like Ti02, SrTiO3 or W have been determined.Show less >
Show more >So as to integrate acoustic functions in BioMEMS using 1 GHz ZnO transducers deposited on silicon substrates, acoustic waves propagation through the silicon substrate and its transmission in water needs to be maximized (the insertion losses at the Si / water interface are about 6dB). In the context of integration, it is interesting for mechanical impedance matching to use photosensitive materials such as SU-8 so that patterns may be obtained. Nanocomposite materials based on SU-8 mixed with nanoparticles having adequate impedances were fabricated. These new materials are characterized in terms of their acoustic velocity, impedance and attenuation. For this, the nanocomposite layers are deposited on the substrate by spin coating to obtain a thickness of about 10 μm, in order to separate acoustic echoes from the material (even if λ/4 layer thickness is lower than 1 μm). The insertion losses of the device immersed in water can be simulated as a function of frequency for a given reflection coefficient between the silicon substrate and the photoresist. The characteristics of some nanocomposites made with SU-8 and various concentrations of nanoparticles like Ti02, SrTiO3 or W have been determined.Show less >
Language :
Anglais
Peer reviewed article :
Oui
Audience :
Non spécifiée
Popular science :
Non
Source :
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