Title :

SU-8-based nanocomposites for acoustical matching layer

Author(s) :

Wang, S. [Auteur]
Campistron, Pierre [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Carlier, Julien [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Matériaux et Acoustiques pour MIcro et NAno systèmes intégrés - IEMN [MAMINA - IEMN]
Debavelaere-Callens, Dorothée [Auteur]
Nongaillard, Bertrand [Auteur]
Ndieguene, Assane [Auteur]
Nassar, Georges [Auteur]
Soyer, Caroline [Auteur]
Zhao, X. [Auteur]

Journal title :

IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control

Pages :

1483-1489

Publisher :

Institute of Electrical and Electronics Engineers

Publication date :

2009

ISSN :

0885-3010

English keyword(s) :

Nanocomposites
Attenuation
Frequency
Silicon
Nanoparticles
Resists
Acoustic applications
Acoustic waves
Temperature
Impedance

HAL domain(s) :

Sciences de l'ingénieur [physics]

English abstract : [en]

SU-8, an epoxy-based photoresist, was introduced as the acoustical matching layer between silicon and water for lab-on-chip applications integrating acoustic characterization. Acoustical performances, including the acoustic ...
Show more >SU-8, an epoxy-based photoresist, was introduced as the acoustical matching layer between silicon and water for lab-on-chip applications integrating acoustic characterization. Acoustical performances, including the acoustic longitudinal wave velocity and attenuation of the SU-8-based matching layer, were characterized at a frequency of 1 GHz at room temperature. The gain in echo characterization with a SU-8/SiO 2 bilayer and with different nanocomposite monolayers made of SU-8 and TiO 2 nanoparticles (size around 35 nm) between silicon and water was characterized as being above 10 dB in each case. With the increase of concentration of TiO 2 in SU-8 based composites from 0 to 30 wt%, acoustical impedance of the nanocomposites increased from about 3 to 6 MRayls, respectively. The acoustical attenuation in the nanocomposites is between 0.5 and 0.6 dB/μm. The most efficient matching was obtained with the nanocomposite integrating 30 wt% TiO 2 nanoparticles, with which the enhanced loss is about 0.34 dB as the attenuation is about 0.5 dB/μm. This type of matching layer has potential applications in lab-on-chip technology for high frequency transducers or in the fabrication of high frequency piezocomposites.Show less >

Language :

Anglais

Popular science :

Non

Collections :

• Institut d'Électronique, de Microélectronique et de Nanotechnologie (IEMN) - UMR 8520

Source :

Harvested from HAL