Design of silicon-pTMDS bio-MEMS with ...
Document type :
Communication dans un congrès avec actes
Title :
Design of silicon-pTMDS bio-MEMS with millimeter and sub-millimeter waves transducers
Author(s) :
Mille, Vianney [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Bourzgui, Nour Eddine [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Medjdoub, Farid [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Bocquet, Bertrand [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Bourzgui, Nour Eddine [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Medjdoub, Farid [Auteur]

Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Bocquet, Bertrand [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Conference title :
34th European Microwave Conference, EuMC 2004
City :
Amsterdam
Country :
Pays-Bas
Start date of the conference :
2004-10-12
Book title :
Proceedings of the 34th European Microwave Conference, EuMC 2004
Publisher :
Horizon House Publications Ltd, London, UK
Publication date :
2004
HAL domain(s) :
Sciences de l'ingénieur [physics]
English abstract : [en]
Biosensors allow investigating complex media with many applications in biology, environment and food processing. But new constraints in terms of sensitivity, real-time measurement and life time lead to new designs. ...
Show more >Biosensors allow investigating complex media with many applications in biology, environment and food processing. But new constraints in terms of sensitivity, real-time measurement and life time lead to new designs. Microfluidic and microsystems technologies can bring interesting solutions. We present here a new technological method for the microfabrication of such biosensors, called hioMEMS, based on the deposition of a polymer on a silicon substrate by “cold” RPECVD. Moreover, this structure is well suitable for the deposition of planar waveguide up to the THz frequencies. We try to develop a transduction function based on the dielectric spectroscopy of biomolecnles and we present some experimental results obtained up to 2ZOGHz with an on-wafer vectorial network analyzer.Show less >
Show more >Biosensors allow investigating complex media with many applications in biology, environment and food processing. But new constraints in terms of sensitivity, real-time measurement and life time lead to new designs. Microfluidic and microsystems technologies can bring interesting solutions. We present here a new technological method for the microfabrication of such biosensors, called hioMEMS, based on the deposition of a polymer on a silicon substrate by “cold” RPECVD. Moreover, this structure is well suitable for the deposition of planar waveguide up to the THz frequencies. We try to develop a transduction function based on the dielectric spectroscopy of biomolecnles and we present some experimental results obtained up to 2ZOGHz with an on-wafer vectorial network analyzer.Show less >
Language :
Anglais
Peer reviewed article :
Oui
Audience :
Internationale
Popular science :
Non
Source :