Self-oscillation mode due to fluid-structure ...
Document type :
Article dans une revue scientifique
DOI :
Title :
Self-oscillation mode due to fluid-structure interaction in a micromechanical valve
Author(s) :
Ducloux, Olivier [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Talbi, Abdelkrim [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Gimeno, Laetitia [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Viard, Romain [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Pernod, Philippe [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Preobrazhensky, Vladimir L. [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Merlen, Alain [Auteur]
Laboratoire de Mécanique de Lille - FRE 3723 [LML]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Talbi, Abdelkrim [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Gimeno, Laetitia [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Viard, Romain [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Pernod, Philippe [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Preobrazhensky, Vladimir L. [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Merlen, Alain [Auteur]

Laboratoire de Mécanique de Lille - FRE 3723 [LML]
Journal title :
Applied Physics Letters
Pages :
034101
Publisher :
American Institute of Physics
Publication date :
2007
ISSN :
0003-6951
English abstract : [en]
This letter presents an original actuation mode for a micromechanical valve based on the induction of a self-oscillation, provided by the strong coupling between a mobile mechanical part and the fluid flow. The presented ...
Show more >This letter presents an original actuation mode for a micromechanical valve based on the induction of a self-oscillation, provided by the strong coupling between a mobile mechanical part and the fluid flow. The presented structure consists of a rigid silicon pad processed on a flexible membrane, both located over a silicon microchannel with structured internal walls. A theoretical analysis, based on a combination of the small perturbations method and a numerical study, shows that a self-oscillation can be induced on the mobile part due to the hybridization of the first flexion and torsion resonance modes interacting with the gas flow. Characterization of the self-oscillating microvalve shows high performances without electric energy supply for control.Show less >
Show more >This letter presents an original actuation mode for a micromechanical valve based on the induction of a self-oscillation, provided by the strong coupling between a mobile mechanical part and the fluid flow. The presented structure consists of a rigid silicon pad processed on a flexible membrane, both located over a silicon microchannel with structured internal walls. A theoretical analysis, based on a combination of the small perturbations method and a numerical study, shows that a self-oscillation can be induced on the mobile part due to the hybridization of the first flexion and torsion resonance modes interacting with the gas flow. Characterization of the self-oscillating microvalve shows high performances without electric energy supply for control.Show less >
Language :
Anglais
Peer reviewed article :
Oui
Audience :
Non spécifiée
Popular science :
Non
Source :