Title :

Technological development of THz microfluidic microsystems for biological spectroscopy

Author(s) :

Mille, Vianney [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
BOURZGUI, Nour-Eddine [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Medjdoub, Farid [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Desplanque, Ludovic [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Lampin, Jean-Francois [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Supiot, Philippe [Auteur]
Laboratoire de Génie des Procédés d'Interactions Fluides Réactifs-Matériaux - EA 3571 [GéPIFRéM]
Bocquet, Bertrand [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]

Conference title :

Conference Digest of the 2004 Joint 29th International Conference on 2004 and 12th International Conference on Terahertz Electronics

City :

Karlsruhe

Country :

Allemagne

Start date of the conference :

2004-09-27

Book title :

Proceedings of the 2004 Joint 29th International Conference on Infrared and Millimeter Waves and 12th International Conference on Terahertz Electronics

Publisher :

IEEE, Piscataway, NJ, USA

Publication date :

2005-05-16

English keyword(s) :

Microfluidics
Spectroscopy
Plasma measurements
Plasma properties
Fabrication
Micromechanical devices
Silicon
Polymer films
Electromagnetic propagation
Chemical vapor deposition

HAL domain(s) :

Sciences de l'ingénieur [physics]

English abstract : [en]

We investigate a possible fabrication of microfluidic MEMS dedicated to the THz spectroscopy in a mixing technology based on silicon substrate coated with a thick layer of polymer. This layer is useful for the microfluidic ...
Show more >We investigate a possible fabrication of microfluidic MEMS dedicated to the THz spectroscopy in a mixing technology based on silicon substrate coated with a thick layer of polymer. This layer is useful for the microfluidic circulation and the electromagnetic propagation. We use an original deposition process realized by RPECVD (remote plasma enhanced vapor deposition), called also "cold plasma". We obtain layers up to 110 /spl mu/m without any cracks. We have measured the dielectric characteristics of this new type of polymer up to 220 GHz with a vectorial network analyzer and between 0.1 to 1.2 THz in the time domain with an electro-optic technique. This technology is now ready and allows realizing a mass production compatible with disposable bioMEMS.Show less >

Language :

Anglais

Peer reviewed article :

Oui

Audience :

Internationale

Popular science :

Non

Collections :

• Institut d'Électronique, de Microélectronique et de Nanotechnologie (IEMN) - UMR 8520

Source :

Harvested from HAL