Piezoelectric properties of PZT: influence ...
Document type :
Article dans une revue scientifique
Title :
Piezoelectric properties of PZT: influence of (Zr/Ti) ratio and niobium substitution
Author(s) :
Journal title :
Ferroelectrics
Pages :
185-195
Publisher :
Taylor & Francis: STM, Behavioural Science and Public Health Titles
Publication date :
2001
ISSN :
0015-0193
English keyword(s) :
r.f.sputtering
Pb(ZrTi)Ox
various Zr/Ti
Nb doped
dielectric
ferroelectric
piezoelectric
Pb(ZrTi)Ox
various Zr/Ti
Nb doped
dielectric
ferroelectric
piezoelectric
HAL domain(s) :
Physique [physics]/Matière Condensée [cond-mat]/Science des matériaux [cond-mat.mtrl-sci]
English abstract : [en]
Pb(Zr,Ti)03 (PZT) and Pb(Zr,Ti,Nb)O, (PNZT) thin films were grown on platinized silicon substrates by r.f. magnetron sputtering followed by a post-annealing treatment. PZT films with various Zrmi compositions ranging from ...
Show more >Pb(Zr,Ti)03 (PZT) and Pb(Zr,Ti,Nb)O, (PNZT) thin films were grown on platinized silicon substrates by r.f. magnetron sputtering followed by a post-annealing treatment. PZT films with various Zrmi compositions ranging from 15/85 to 70/30 were grown; for PNZT films (the ratio Zrni is fixed to 54/46) the Niobium concentration varied from 1 to 7 at.% by increment of 1 at.%. The main objective of this work is to determine the effects of the Zrni ratio and the Nb concentration on the electrical properties of PZT thin films. The dielectric, ferroelectric and piezoelectric properties of the films were systematically evaluated. In particular, the piezoelectric properties were very sensitive to the Nb substitution and the ZrRi ratio.Show less >
Show more >Pb(Zr,Ti)03 (PZT) and Pb(Zr,Ti,Nb)O, (PNZT) thin films were grown on platinized silicon substrates by r.f. magnetron sputtering followed by a post-annealing treatment. PZT films with various Zrmi compositions ranging from 15/85 to 70/30 were grown; for PNZT films (the ratio Zrni is fixed to 54/46) the Niobium concentration varied from 1 to 7 at.% by increment of 1 at.%. The main objective of this work is to determine the effects of the Zrni ratio and the Nb concentration on the electrical properties of PZT thin films. The dielectric, ferroelectric and piezoelectric properties of the films were systematically evaluated. In particular, the piezoelectric properties were very sensitive to the Nb substitution and the ZrRi ratio.Show less >
Language :
Anglais
Peer reviewed article :
Oui
Audience :
Non spécifiée
Popular science :
Non
Source :
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