Title :

1.1 GHz silicon blade nano-electromechanical resonator featuring 20 nm gap lateral transducers

Author(s) :

Agache, Vincent [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Legrand, Bernard [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Collard, Dominique [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Fujita, Hiroyuki [Auteur]
Buchaillot, Lionel [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]

Conference title :

18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005

City :

Miami Beach

Country :

Etats-Unis d'Amérique

Start date of the conference :

2005-01-30

Book title :

Proceedings of the 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005

Publisher :

IEEE, Piscataway, NJ, USA

Publication date :

2005

English keyword(s) :

Silicon
Blades
Transducers
Geometry
Electrodes
Radio frequency
Resonance
Voltage
Transceivers
Energy consumption

HAL domain(s) :

Sciences de l'ingénieur [physics]

English abstract : [en]

For the first time, an electromechanical resonator based on a blade geometry is proposed. This particular geometry allows self-alignment of the mechanical resonator to its lateral electrodes while achieving high eigenfrequencies ...
Show more >For the first time, an electromechanical resonator based on a blade geometry is proposed. This particular geometry allows self-alignment of the mechanical resonator to its lateral electrodes while achieving high eigenfrequencies in the GHz range.Show less >

Language :

Anglais

Peer reviewed article :

Oui

Audience :

Non spécifiée

Popular science :

Non

Collections :

• Institut d'Électronique, de Microélectronique et de Nanotechnologie (IEMN) - UMR 8520

Source :

Harvested from HAL