Title :

A different way of performing picosecond ultrasonic measurements in thin transparent films based on laser-wavelength effects

Author(s) :

Devos, Arnaud [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Cote, Renaud [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Caruyer, Grégory [Auteur]
STMicroelectronics [Crolles] [ST-CROLLES]
Lefevre, Arnaud [Auteur]
Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information [CEA-LETI]

Journal title :

Applied Physics Letters

Pages :

211903

Publisher :

American Institute of Physics

Publication date :

2005

ISSN :

0003-6951

HAL domain(s) :

Physique [physics]

English abstract : [en]

We present a way of using picosecond ultrasonics to simultaneously get the thickness and elastic properties of thin dielectric layers. This is based on the use of a blue probe which is shown to improve the detection of ...
Show more >We present a way of using picosecond ultrasonics to simultaneously get the thickness and elastic properties of thin dielectric layers. This is based on the use of a blue probe which is shown to improve the detection of acousto-optic oscillations in the dielectric from which the sound velocity can be measured from the refractive index. At the same wavelength a strong response of the silicon is used to detect the arrival of the acoustic pulse. We apply this scheme to various materials deposited on silicon substrates.Show less >

Language :

Anglais

Peer reviewed article :

Oui

Audience :

Non spécifiée

Popular science :

Non

Collections :

• Institut d'Électronique, de Microélectronique et de Nanotechnologie (IEMN) - UMR 8520

Source :

Harvested from HAL