Title :

Thermal conductivity and interfacial effect of parylene C thin film using the 3-omega method

Author(s) :

Guermoudi, Amine Abdelkader []
Cresson, Pierre-Yves [Auteur]
Université d'Artois [UA]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Ouldabbes, Amaria [Auteur]
Unité de Recherche Matériaux et Energies Renouvelables [URMER]
Boussatour, Ghizlane [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Lasri, Tuami [Auteur]
Microtechnology and Instrumentation for Thermal and Electromagnetic Characterization - IEMN [MITEC - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]

Journal title :

JOURNAL OF THERMAL ANALYSIS AND CALORIMETRY

Pages :

1-12

Publisher :

Springer Verlag

Publication date :

2021-07

ISSN :

1388-6150

English keyword(s) :

Thin films
Thermal conductivity
Thermal contact resistance
3-omega technique
Parylene
Finite element method (FEM)

HAL domain(s) :

Sciences de l'ingénieur [physics]

English abstract : [en]

Parylene has attracted a great interest in the last years because of its potential use in many fields. Among all kinds of parylene, parylene C seems the most interesting one for a large range of applications. In this paper, ...
Show more >Parylene has attracted a great interest in the last years because of its potential use in many fields. Among all kinds of parylene, parylene C seems the most interesting one for a large range of applications. In this paper, we are interested in its thermal properties, and in particular the thermal conductivity of thin films. This later is determined by the so-called three-omega method. This technique makes use of a thin conducting strip, in contact with the material under test. The metal wire serves both as a heat source for applying a heat flux and a sensitive thermometer for measuring the surface temperature. The thermal conductivity of parylene C films of different thicknesses (210, 440 and 760 nm) deposited by CVD process on borosilicate substrates is investigated. It is demonstrated that the effective thermal conductivity increases as a function of the thickness of thin film (81.20 x 10(-3), 88.37 x 10(-3) and 92.81 x 10(-3) W m(-1) K-1 are measured, respectively). This effect is produced by the phonon scattering boundary at the interface between substrate/film and film/heater. To highlight the presence of contact thermal resistances and to estimate their value, a numerical approach, based on a finite element method using the software COMSOL(R) Multiphysics, is also proposed. This study shows that the main part (97%) of the interfacial thermal resistance is due to the contact between the parylene C film and the substrate.Show less >

Language :

Anglais

Peer reviewed article :

Oui

Audience :

Internationale

Popular science :

Non

Collections :

• Institut d'Électronique, de Microélectronique et de Nanotechnologie (IEMN) - UMR 8520

Source :

Harvested from HAL