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Thermal conductivity and interfacial effect ...
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Document type :
Article dans une revue scientifique
DOI :
10.1007/s10973-020-09612-z
Title :
Thermal conductivity and interfacial effect of parylene C thin film using the 3-omega method
Author(s) :
Guermoudi, Amine Abdelkader []
Cresson, Pierre-Yves [Auteur]
Université d'Artois [UA]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Ouldabbes, Amaria [Auteur]
Unité de Recherche Matériaux et Energies Renouvelables [URMER]
Boussatour, Ghizlane [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Lasri, Tuami [Auteur]
Microtechnology and Instrumentation for Thermal and Electromagnetic Characterization - IEMN [MITEC - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Journal title :
JOURNAL OF THERMAL ANALYSIS AND CALORIMETRY
Pages :
1-12
Publisher :
Springer Verlag
Publication date :
2021-07
ISSN :
1388-6150
English keyword(s) :
Thin films
Thermal conductivity
Thermal contact resistance
3-omega technique
Parylene
Finite element method (FEM)
HAL domain(s) :
Sciences de l'ingénieur [physics]
English abstract : [en]
Parylene has attracted a great interest in the last years because of its potential use in many fields. Among all kinds of parylene, parylene C seems the most interesting one for a large range of applications. In this paper, ...
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Parylene has attracted a great interest in the last years because of its potential use in many fields. Among all kinds of parylene, parylene C seems the most interesting one for a large range of applications. In this paper, we are interested in its thermal properties, and in particular the thermal conductivity of thin films. This later is determined by the so-called three-omega method. This technique makes use of a thin conducting strip, in contact with the material under test. The metal wire serves both as a heat source for applying a heat flux and a sensitive thermometer for measuring the surface temperature. The thermal conductivity of parylene C films of different thicknesses (210, 440 and 760 nm) deposited by CVD process on borosilicate substrates is investigated. It is demonstrated that the effective thermal conductivity increases as a function of the thickness of thin film (81.20 x 10(-3), 88.37 x 10(-3) and 92.81 x 10(-3) W m(-1) K-1 are measured, respectively). This effect is produced by the phonon scattering boundary at the interface between substrate/film and film/heater. To highlight the presence of contact thermal resistances and to estimate their value, a numerical approach, based on a finite element method using the software COMSOL(R) Multiphysics, is also proposed. This study shows that the main part (97%) of the interfacial thermal resistance is due to the contact between the parylene C film and the substrate.Show less >
Language :
Anglais
Peer reviewed article :
Oui
Audience :
Internationale
Popular science :
Non
Collections :
  • Institut d'Électronique, de Microélectronique et de Nanotechnologie (IEMN) - UMR 8520
Source :
Harvested from HAL
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