PFM Performances Analysis of PZT Piezoelectric Nano Cantilevers Fabricated on Si Wafer

Remiens, Denis; Costecalde, Jean; Dezest, Denis; Mathieu, Fabrice; Nicu, Liviu

Document type :

Article dans une revue scientifique

DOI :

10.2174/2210681205666150601215725

Title :

PFM Performances Analysis of PZT Piezoelectric Nano Cantilevers Fabricated on Si Wafer

Author(s) :

Remiens, Denis [Auteur]
Matériaux et Acoustiques pour MIcro et NAno systèmes intégrés - IEMN [MAMINA - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Costecalde, Jean [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Dezest, Denis [Auteur]
Laboratoire d'analyse et d'architecture des systèmes [LAAS]
Mathieu, Fabrice [Auteur]
Service Instrumentation Conception Caractérisation [LAAS-I2C]
Nicu, Liviu [Auteur]
Équipe NanoBioSystèmes [LAAS-NBS]

Journal title :

Nanoscience &Nanotechnology-Asia

Pages :

15-24

Publication date :

2015-07-28

ISSN :

2210-6812

English keyword(s) :

NEMS
PFM
piezoelectricity
PZT

HAL domain(s) :

Sciences de l'ingénieur [physics]

English abstract : [en]

We present in this work and for the first time a high level of integration of piezoelectric nano-cantilevers on a silicon substrate (4 inches in diameter). We use lead titanate – zirconate material as piezoelectric material ...
Show more >We present in this work and for the first time a high level of integration of piezoelectric nano-cantilevers on a silicon substrate (4 inches in diameter). We use lead titanate – zirconate material as piezoelectric material mainly because of its excellent piezoelectric activity at macro scale. However, its integration within a silicon technological process is limited by the difficulty of structuring this material with sub micrometer resolution at the wafer scale. At the nano-scale many questions still remain unanswered. For example: what becomes of the piezoelectric activity? What are the limitations of the integration level process? What are the best electrodes (bottom and top) for piezoelectric film actuation? In this study we have tried to answer some of these fundamental questions. To this end, we have developed a specific patterning method based on deep UV lithography to fabricate nano cantilevers with a high density of integration. The main objective is to obtain sub-micron features by lifting off a 70-nm thick PZT layer while preserving the material’s piezoelectric properties. We show that for the actuation of a very thin film the choice of the bottom and top electrodes has a strong influence. To analyse the piezoelectric activity at nano scale we use the Piezo Force Microscopy, this measurement approach is a good characterization tool for piezoelectric nano devicesShow less >

Language :

Anglais

Peer reviewed article :

Oui

Audience :

Internationale

Popular science :

Non

Collections :

Institut d'Électronique, de Microélectronique et de Nanotechnologie (IEMN) - UMR 8520

Source :

Harvested from HAL

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