Vibrational Characteristics Modeling of a ...
Document type :
Compte-rendu et recension critique d'ouvrage
Title :
Vibrational Characteristics Modeling of a PZT5A Mems Resonator Disc Metallized with Alternating Electrical Source
Author(s) :
Naciri, Ismail [Auteur]
Université Ibn Zohr [Ouarzazate] [UIZ]
Rguiti, Abdessamad [Auteur]
Université Ibn Zohr [Ouarzazate] [UIZ]
Elmaimouni, Lahoucine [Auteur]
Université Ibn Zohr [Ouarzazate] [UIZ]
Lefebvre, Jean-Etienne [Auteur]
Matériaux et Acoustiques pour MIcro et NAno systèmes intégrés - IEMN [MAMINA - IEMN]
Belkassmi, Youssef [Auteur]
Université Ibn Zohr [Ouarzazate] [UIZ]
Ratolojanahary, Faniry Emilson [Auteur]
Université Ibn Zohr [Ouarzazate] [UIZ]
Rguiti, Abdessamad [Auteur]
Université Ibn Zohr [Ouarzazate] [UIZ]
Elmaimouni, Lahoucine [Auteur]
Université Ibn Zohr [Ouarzazate] [UIZ]
Lefebvre, Jean-Etienne [Auteur]
Matériaux et Acoustiques pour MIcro et NAno systèmes intégrés - IEMN [MAMINA - IEMN]
Belkassmi, Youssef [Auteur]
Université Ibn Zohr [Ouarzazate] [UIZ]
Ratolojanahary, Faniry Emilson [Auteur]
Journal title :
International Journal of Mechanical and Production Engineering Research and Development
Pages :
1235-1248
Publisher :
Transstellar Journal Publications and Research Consultancy Private Limited
Publication date :
2018-04-30
ISSN :
2249-6890
English keyword(s) :
"Legendre Polynomial"
"MEMS Resonator"
"Partial Metallization & Frequency Response"
"MEMS Resonator"
"Partial Metallization & Frequency Response"
HAL domain(s) :
Sciences de l'ingénieur [physics]
Sciences de l'ingénieur [physics]/Micro et nanotechnologies/Microélectronique
Sciences de l'ingénieur [physics]/Matériaux
Sciences de l'ingénieur [physics]/Acoustique [physics.class-ph]
Sciences de l'ingénieur [physics]/Micro et nanotechnologies/Microélectronique
Sciences de l'ingénieur [physics]/Matériaux
Sciences de l'ingénieur [physics]/Acoustique [physics.class-ph]
English abstract : [en]
With the purpose of integrating new functionalities in micro electro mechanical resonators, frequency response of such resonators has been gained more importance since long time ago. Previous studies have only concentrated ...
Show more >With the purpose of integrating new functionalities in micro electro mechanical resonators, frequency response of such resonators has been gained more importance since long time ago. Previous studies have only concentrated on geometries with full metallization and centralized partial metallization. This paper proposes a study of wave propagation, in case of a homogeneous circular disk excited by an AC electrical source with partial annular metallization using Legendre polynomial approach. Our study consists of solving equation of motion and characteristic equations of piezoelectricity with appropriate boundary and continuity conditions. Numerical calculation provides both modal and harmonic analysis, whatever the mode order. In addition to dispersion curves, mechanical and electrical dispersion profiles were presented in a 3D configuration. The impact of varying metallization rates on resonance frequencies is highlighted. The validity of Legendre polynomial method is confirmed through a comparison between polynomial and analytical results provided in the literature.Show less >
Show more >With the purpose of integrating new functionalities in micro electro mechanical resonators, frequency response of such resonators has been gained more importance since long time ago. Previous studies have only concentrated on geometries with full metallization and centralized partial metallization. This paper proposes a study of wave propagation, in case of a homogeneous circular disk excited by an AC electrical source with partial annular metallization using Legendre polynomial approach. Our study consists of solving equation of motion and characteristic equations of piezoelectricity with appropriate boundary and continuity conditions. Numerical calculation provides both modal and harmonic analysis, whatever the mode order. In addition to dispersion curves, mechanical and electrical dispersion profiles were presented in a 3D configuration. The impact of varying metallization rates on resonance frequencies is highlighted. The validity of Legendre polynomial method is confirmed through a comparison between polynomial and analytical results provided in the literature.Show less >
Language :
Anglais
Popular science :
Non
Source :
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- https://doi.org/10.24247/ijmperdapr2018163
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