Title :

Performance and Crosstalk Evaluation of 2-D Array Piezoelectric Micromachined Ultrasonic Transducer with 3-D Finite Element Simulation

Author(s) :

He, Le-Ming [Auteur]
Transduction, Propagation et Imagerie Acoustique - IEMN [TPIA - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Xu, Wei-Jiang [Auteur]
INSA Institut National des Sciences Appliquées Hauts-de-France [INSA Hauts-De-France]
Transduction, Propagation et Imagerie Acoustique - IEMN [TPIA - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Liu, Wen-Juan [Auteur]
Matériaux et Acoustiques pour MIcro et NAno systèmes intégrés - IEMN [MAMINA - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Wang, Xu-Bo [Auteur]
State Key Laboratory of ASIC and System
Zhou, Jia [Auteur]
State Key Laboratory of ASIC and System
Ren, Jun-Yan [Auteur]
State Key Laboratory of ASIC and System

Conference title :

IEEE International Ultrasonics Symposium (IUS 2019)

City :

Glasgow

Country :

Royaume-Uni

Start date of the conference :

2019-10-06

Publisher :

IEEE

English keyword(s) :

Crosstalk
Stress
Cavity resonators
Finite element analysis
Vibrations
Impedance
Ultrasonic transducers

HAL domain(s) :

Sciences de l'ingénieur [physics]
Informatique [cs]
Physique [physics]
Sciences de l'ingénieur [physics]/Acoustique [physics.class-ph]
Sciences de l'ingénieur [physics]/Matériaux
Sciences de l'ingénieur [physics]/Micro et nanotechnologies/Microélectronique

English abstract : [en]

Micro-machined ultrasonic transducer (MUT) arrays have their structure and fabrication technology fundamentally different to those of thickness mode piezoelectric transducers. Their performance needs to be modelled and ...
Show more >Micro-machined ultrasonic transducer (MUT) arrays have their structure and fabrication technology fundamentally different to those of thickness mode piezoelectric transducers. Their performance needs to be modelled and optimized before MEMS fabrication process is engaged. A 3-dimentional finite element modeling (3-D FEM) analysis is established for the simulation of a 2-D 7×7 piezoelectric micromachined ultrasonic transducer (PMUT) array in its cavity and buffer structure. The main characteristics and parameters of the PMUT are calculated in frequency domain, in terms of the electrical impedance, resonant modes patterns, stress distribution, and in particular the cross talk between array elements, The method provides an efficient tool for the design and optimization of PMUT structures. A novel structure with double active layers PMUT is proposed and simulated with the FEM.Show less >

Language :

Anglais

Peer reviewed article :

Oui

Audience :

Internationale

Popular science :

Non

Collections :

• Institut d'Électronique, de Microélectronique et de Nanotechnologie (IEMN) - UMR 8520

Source :

Harvested from HAL