Title :

Electromechanical properties of sodium bismuth titanate thin films

Author(s) :

Kossman, Stephania [Auteur correspondant]
Laboratoire d'Automatique, de Mécanique et d'Informatique industrielles et Humaines - UMR 8201 [LAMIH]
Hamieh, Arthur [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Matériaux et Acoustiques pour MIcro et NAno systèmes intégrés - IEMN [MAMINA - IEMN]
Ponchel, Freddy [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Matériaux et Acoustiques pour MIcro et NAno systèmes intégrés - IEMN [MAMINA - IEMN]
Remiens, Denis [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Matériaux et Acoustiques pour MIcro et NAno systèmes intégrés - IEMN [MAMINA - IEMN]
Bigerelle, Maxence [Auteur]
Laboratoire d'Automatique, de Mécanique et d'Informatique industrielles et Humaines - UMR 8201 [LAMIH]

Journal title :

Thin Solid Films

Pages :

139459

Publisher :

Elsevier

Publication date :

2022-10-01

ISSN :

0040-6090

English keyword(s) :

Lead free piezoelectric films
Sputtering
Crystallization
Electromechanical characterization
Nanoindentation

HAL domain(s) :

Sciences de l'ingénieur [physics]

English abstract : [en]

Lead-free piezoelectric sodium bismuth titanate (BNT) films are promising candidates for actuators applications as an alternative to lead zirconate titanate films. We focused in this work on the growth and characteristics ...
Show more >Lead-free piezoelectric sodium bismuth titanate (BNT) films are promising candidates for actuators applications as an alternative to lead zirconate titanate films. We focused in this work on the growth and characteristics of BNT films deposited by sputtering on silicon substrates with LaNiO3 electrodes. The films are amorphous previous to post-annealing treatments. We studied the influence of the crystallization state and film thickness on their electromechanical properties. Namely, we evaluated the piezoelectric properties, reduced elastic modulus, and hardness. BNT films fully crystallized (f-c) in the desired perovskite structure, without second phase, after post-annealing at 650°C. Relative permittivity grew from 60 to 540 for an amorphous vs. a f-c film and the d33eff coefficient improved with film thickness to 60 pm/V for a 450 nm thick film. The BNT film's mechanical properties increased with film crystallization from the amorphous structure to the f-c: 134 to 149 GPa for reduced modulus and 7 to 9 GPa for hardness. However, the film thickness did not remarkably modify the mechanical properties, yet a slight decrease for the 450 nm film was explained by previous cracking on the surface.Show less >

Language :

Anglais

Peer reviewed article :

Oui

Audience :

Internationale

Popular science :

Non

ANR Project :

Etude du comportement piézoélectrique multi-échelles de composites innovants micro- et nano-structurés

Collections :

• Institut d'Électronique, de Microélectronique et de Nanotechnologie (IEMN) - UMR 8520

Source :

Harvested from HAL