Title :

Sputtered (Fe,Mn)₃O₄ Spinel Oxide Thin Films for Micro-Supercapacitor

Author(s) :

Jolayemi, Bukola [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Buvat, Gaetan [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Brousse, Thierry [Auteur]
Institut des Matériaux Jean Rouxel [IMN]
Roussel, Pascal [Auteur]
Unité de Catalyse et Chimie du Solide - UMR 8181 [UCCS]
Lethien, Christophe [Auteur correspondant]
Institut Universitaire de France [IUF]
Circuits Systèmes Applications des Micro-ondes - IEMN [CSAM - IEMN ]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]

Journal title :

Journal of The Electrochemical Society

Publisher :

Electrochemical Society

Publication date :

2022-11-04

ISSN :

0013-4651

English keyword(s) :

Jolayemi
Bukola
IEMN buvat
gaetan
IEMN
Fe
Mn
thin films
Sputtering
micro-supercapacitors
Pseudocapacitance

HAL domain(s) :

Sciences de l'ingénieur [physics]

English abstract : [en]

The scaling up of wireless operating microelectronics for upcoming Internet of Things (IoT) applications demands high-performance micro-supercapacitors (MSCs) with corresponding high-energy and power capabilities. Indeed, ...
Show more >The scaling up of wireless operating microelectronics for upcoming Internet of Things (IoT) applications demands high-performance micro-supercapacitors (MSCs) with corresponding high-energy and power capabilities. Indeed, this necessitates the quest for MSC's electrode materials capable of delivering high energy density at high charge/discharge rates. Many multicationic oxides, such as spinel manganese-iron compounds, demonstrate good pseudocapacitive properties as positive electrodes in conventional supercapacitors. However, fulfilling the required fabrication techniques is a challenge for their applications in MSCs. Hence, this study, for the first time, demonstrates the successful deposition of spinel Mn-Fe thin films on a functional platinum-based current collector. The deposition is achieved in a reactive oxygen environment via reactive DC magnetron sputtering techniques and subsequently annealed ex-situ at 600°C in a nitrogen environment. The electrochemical signature in neutral 1 M Na2SO4 aqueous electrolyte is comparable to those reported for spinel type Mn-Fe bulk counterparts. The areal capacitance at 10.0 mV.s-1 is 15.5 mF.cm-2 for 1 µm thick film, exhibiting excellent coulombic efficiency (close to 100%) and long-term cycle stability after 10,000 cycles. Thus, the synthesis of the multicationic pseudocapacitive oxides via compatible microelectronic deposition methods has set a prospective path to achieve very high-performance MSCs for future IoT applications.Show less >

Language :

Anglais

Peer reviewed article :

Oui

Audience :

Internationale

Popular science :

Non

ANR Project :

Laboratory of excellency for electrochemical energy storage

Collections :

• Institut d'Électronique, de Microélectronique et de Nanotechnologie (IEMN) - UMR 8520

Source :

Harvested from HAL

Submission date :

2022-11-11T14:03:02Z