Title :

Characterization of carbon nitride layers deposited by IR laser ablation of graphite target in a remote nitrogen plasma atmosphere: nanoparticle evidence

Author(s) :

Al Khawwam, A. [Auteur]
Laboratoire de Génie des Procédés d'Interactions Fluides Réactifs-Matériaux - EA 3571 [GéPIFRéM]
Jama, Charafeddine [Auteur]
Laboratoire de Génie des Procédés d'Interactions Fluides Réactifs-Matériaux - EA 3571 [GéPIFRéM]
Goudmand, P. [Auteur]
Laboratoire de Génie des Procédés d'Interactions Fluides Réactifs-Matériaux - EA 3571 [GéPIFRéM]
Dessaux, O. [Auteur]
Laboratoire de Génie des Procédés d'Interactions Fluides Réactifs-Matériaux - EA 3571 [GéPIFRéM]
El Achari, A. [Auteur]
Génie des Matériaux Textiles - ULR 2461 [GEMTEX]
École nationale supérieure des arts et industries textiles [ENSAIT]
Dhamelincourt, P. [Auteur]
Laboratoire Avancé de Spectroscopie pour les Intéractions la Réactivité et l'Environnement - UMR 8516 [LASIRE]
Patrat, G. [Auteur]

Journal title :

Thin Solid Films

Abbreviated title :

Thin Solid Films

Volume number :

408

Pages :

15-25

Publication date :

2001-12

ISSN :

0040-6090

English keyword(s) :

carbon nitride
laser ablation
Raman scattering
atomic force microscopy (AFM)

HAL domain(s) :

Sciences de l'ingénieur [physics]

English abstract : [en]

Carbon nitride layers were deposited on unheated Si(100) substrates by CO2 IR laser ablation of graphite in a remote nitrogen plasma atmosphere. The diagnostic techniques Fourier-transform infrared (FTIR) and Raman ...
Show more >Carbon nitride layers were deposited on unheated Si(100) substrates by CO2 IR laser ablation of graphite in a remote nitrogen plasma atmosphere. The diagnostic techniques Fourier-transform infrared (FTIR) and Raman spectroscopy, scanning electron microscopy (SEM), atomic force microscopy (AFM), X-ray diffraction (XRD) and resistivity measurements were used to characterize the layers deposited. These characteristics were studied as a function of nitrogen pressure. The deposits have a granular structure with a fairly rough surface, as observed by SEM and AFM. Raman spectroscopy shows a change in the size of sp2 cluster domains and gives an idea of the disorder of the deposit network. These cluster-size changes, in accordance with the AFM and SEM analyses, induce some modification of the deposit porosity, which could explain the increase in film resistivity. The XRD measurements indicate that the deposit could contain some α-C3N4 crystals that are dispersed in an amorphous graphite like phase.Show less >

Language :

Anglais

Peer reviewed article :

Oui

Audience :

Internationale

Popular science :

Non

Administrative institution(s) :

Université de Lille
ENSAIT
Junia HEI

Collections :

• Génie des matériaux textiles (GEMTEX) - ULR 2641
• Laboratoire Avancé de Spectroscopie pour les Intéractions la Réactivité et l'Environnement (LASIRE) - UMR 8516

Submission date :

2023-06-20T06:49:41Z
2024-03-25T10:07:11Z