Friction driven micromotors with both ...
Document type :
Autre communication scientifique (congrès sans actes - poster - séminaire...): Communication dans un congrès avec actes
Title :
Friction driven micromotors with both clockwise and counterclockwise rotations
Author(s) :
Legrand, Bernard [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Buchaillot, Lionel [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Collard, Dominique [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Buchaillot, Lionel [Auteur]

Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Collard, Dominique [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Conference title :
17e Congrès Français de Mécanique
City :
Troyes
Country :
France
Start date of the conference :
2005
Publication date :
2005
English keyword(s) :
MEMS
micromotor
friction
stiction
micromotor
friction
stiction
HAL domain(s) :
Sciences de l'ingénieur [physics]/Mécanique [physics.med-ph]
English abstract : [en]
This submission presents friction driven angular micro-motors that demonstrate both clockwise (CW) and counter clockwise (CCW) rotations with a single set of mechanical converters. Fabrication technology is based on surface ...
Show more >This submission presents friction driven angular micro-motors that demonstrate both clockwise (CW) and counter clockwise (CCW) rotations with a single set of mechanical converters. Fabrication technology is based on surface micromachining of polycrystalline silicon layers in thin films. Rotor diameter is 125μm and converter vibration is obtained by the use of combdrive actuators. Rotation direction depends on the operating conditions (driving amplitude and frequency of the actuator) that lead to either pure friction or to friction and stiction between the converters and the rotor. Potential applications for driving micro-mechansims will benefit from a high available torque at low speeds.Show less >
Show more >This submission presents friction driven angular micro-motors that demonstrate both clockwise (CW) and counter clockwise (CCW) rotations with a single set of mechanical converters. Fabrication technology is based on surface micromachining of polycrystalline silicon layers in thin films. Rotor diameter is 125μm and converter vibration is obtained by the use of combdrive actuators. Rotation direction depends on the operating conditions (driving amplitude and frequency of the actuator) that lead to either pure friction or to friction and stiction between the converters and the rotor. Potential applications for driving micro-mechansims will benefit from a high available torque at low speeds.Show less >
Language :
Anglais
Peer reviewed article :
Oui
Audience :
Non spécifiée
Popular science :
Non
Source :
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