Combined scanning microwave and electron microscopy: a novel toolbox for hybrid nanoscale material analysis
[Invited]
Document type :
Communication dans un congrès avec actes
Title :
Combined scanning microwave and electron microscopy: a novel toolbox for hybrid nanoscale material analysis
[Invited]
[Invited]
Author(s) :
Haddadi, Kamel [Auteur]
Circuits Systèmes Applications des Micro-ondes - IEMN [CSAM - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Haenssler, O. C. [Auteur]
Daffe, K. [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Eliet, Sophie [Auteur]
Plateforme de Caractérisation Multi-Physiques - IEMN [PCMP - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Boyaval, Christophe [Auteur]
Centrale de Micro Nano Fabrication - IEMN [CMNF - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Théron, Didier [Auteur]
Nano and Microsystems - IEMN [NAM6 - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Dambrine, Gilles [Auteur]
Advanced NanOmeter DEvices - IEMN [ANODE - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]

Circuits Systèmes Applications des Micro-ondes - IEMN [CSAM - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Haenssler, O. C. [Auteur]
Daffe, K. [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Eliet, Sophie [Auteur]
Plateforme de Caractérisation Multi-Physiques - IEMN [PCMP - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Boyaval, Christophe [Auteur]
Centrale de Micro Nano Fabrication - IEMN [CMNF - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Théron, Didier [Auteur]

Nano and Microsystems - IEMN [NAM6 - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Dambrine, Gilles [Auteur]

Advanced NanOmeter DEvices - IEMN [ANODE - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Conference title :
IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes, IMWS-AMP 2017
City :
Pavia
Country :
Italie
Start date of the conference :
2017-09-20
Journal title :
Proceedings of 2017 IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes, IMWS-AMP 2017
Publication date :
2017
HAL domain(s) :
Sciences de l'ingénieur [physics]
French abstract :
A novel toolbox for hybrid nanoscale material characterization is presented. The system consists of a nano-robotic, compact and modular near-field scanning microwave microscope (NSMM) integrated into a high resolution ...
Show more >A novel toolbox for hybrid nanoscale material characterization is presented. The system consists of a nano-robotic, compact and modular near-field scanning microwave microscope (NSMM) integrated into a high resolution scanning electron microscope (SEM). The instrument developed can perform hybrid characterizations by providing simultaneously atomic force, complex microwave impedance and electron microscopy images of material samples with nanometer spatial resolution. By combining the measured data, the system offers unprecedentable capabilities for tackling the issue between spatial resolution and high frequency quantitative measurements.Show less >
Show more >A novel toolbox for hybrid nanoscale material characterization is presented. The system consists of a nano-robotic, compact and modular near-field scanning microwave microscope (NSMM) integrated into a high resolution scanning electron microscope (SEM). The instrument developed can perform hybrid characterizations by providing simultaneously atomic force, complex microwave impedance and electron microscopy images of material samples with nanometer spatial resolution. By combining the measured data, the system offers unprecedentable capabilities for tackling the issue between spatial resolution and high frequency quantitative measurements.Show less >
Language :
Anglais
Peer reviewed article :
Oui
Audience :
Internationale
Popular science :
Non
ANR Project :
Source :