Multimodal imaging technology by integrated ...
Document type :
Compte-rendu et recension critique d'ouvrage
DOI :
Title :
Multimodal imaging technology by integrated scanning electron, force, and microwave microscopy and its application to study microscaled capacitors
Author(s) :
Haenssler, Olaf [Auteur]
Department für Informatik [Oldenburg]
Fatikow, Sergej [Auteur]
Department für Informatik [Oldenburg]
Théron, Didier [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Nano and Microsystems - IEMN [NAM6 - IEMN]
Department für Informatik [Oldenburg]
Fatikow, Sergej [Auteur]
Department für Informatik [Oldenburg]
Théron, Didier [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Nano and Microsystems - IEMN [NAM6 - IEMN]
Journal title :
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics
Pages :
022901
Publisher :
AVS through the American Institute of Physics
Publication date :
2018
ISSN :
2166-2746
English keyword(s) :
Electromagnetism
Microwave frequencies
Computer software
Optical imaging
Microscopy
Microwave spectroscopy
Nanorobotics
Optical interferometers
Chemical elements
Microwave frequencies
Computer software
Optical imaging
Microscopy
Microwave spectroscopy
Nanorobotics
Optical interferometers
Chemical elements
HAL domain(s) :
Sciences de l'ingénieur [physics]/Micro et nanotechnologies/Microélectronique
Sciences de l'ingénieur [physics]
Sciences de l'ingénieur [physics]
English abstract : [en]
Extracting simultaneously multimodal nanoscale specimen information, by an integrated microscopy technology, is in the focus of this report. The combination of multiple imaging techniques allows for obtaining complementary ...
Show more >Extracting simultaneously multimodal nanoscale specimen information, by an integrated microscopy technology, is in the focus of this report. The combination of multiple imaging techniques allows for obtaining complementary and often unique datasets of samples under test. An instrumental setup operating under high-vacuum conditions inside the chamber of a scanning electron microscope (SEM), as a platform fusing various microscopy methods, techniques and processes, illustrates the potential of such multimodal technology. An atomic force microscope based on a compact optical interferometer performs imaging of surface topographies and a scanning microwave microscope records electromagnetic properties in the microwave frequency domain at the same time and spot. An open-source software framework, tailored for vision-based automation by nanorobotics, controls the instrument. The setup allows for simultaneously observing the region-of-interest with SEM resolution, while imaging and characterizing with evanescent microwaves and atomic forces. To validate the approach an analysis of microscale capacitors is included.Show less >
Show more >Extracting simultaneously multimodal nanoscale specimen information, by an integrated microscopy technology, is in the focus of this report. The combination of multiple imaging techniques allows for obtaining complementary and often unique datasets of samples under test. An instrumental setup operating under high-vacuum conditions inside the chamber of a scanning electron microscope (SEM), as a platform fusing various microscopy methods, techniques and processes, illustrates the potential of such multimodal technology. An atomic force microscope based on a compact optical interferometer performs imaging of surface topographies and a scanning microwave microscope records electromagnetic properties in the microwave frequency domain at the same time and spot. An open-source software framework, tailored for vision-based automation by nanorobotics, controls the instrument. The setup allows for simultaneously observing the region-of-interest with SEM resolution, while imaging and characterizing with evanescent microwaves and atomic forces. To validate the approach an analysis of microscale capacitors is included.Show less >
Language :
Anglais
Popular science :
Non
ANR Project :
Source :
Files
- https://hal.archives-ouvertes.fr/hal-03022536/document
- Open access
- Access the document
- https://hal.archives-ouvertes.fr/hal-03022536/document
- Open access
- Access the document
- https://hal.archives-ouvertes.fr/hal-03022536/document
- Open access
- Access the document
- document
- Open access
- Access the document
- Haenssler_Theron_Fatikow_JVST_B_2018.pdf
- Open access
- Access the document