Temperature compensated magnetic field ...
Document type :
Compte-rendu et recension critique d'ouvrage
DOI :
Title :
Temperature compensated magnetic field sensor based on Love waves
Author(s) :
Mishra, Harshad [Auteur]
Institut Jean Lamour [IJL]
Streque, Jérémy [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Hehn, Michel [Auteur]
Institut Jean Lamour [IJL]
Mengue, Prince [Auteur]
Institut Jean Lamour [IJL]
M'Jahed, Hamid [Auteur]
Institut Jean Lamour [IJL]
Lacour, Daniel [Auteur]
Institut Jean Lamour [IJL]
Dumesnil, Karine [Auteur]
Institut Jean Lamour [IJL]
Petit-Watelot, S. [Auteur]
Institut Jean Lamour [IJL]
Zhgoon, Sergei [Auteur]
Polewczyk, Vincent [Auteur]
Institut Jean Lamour [IJL]
Mazzamurro, Aurélien [Auteur]
Talbi, Abdelkrim [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Acoustique Impulsionnelle & Magnéto-Acoustique Non linéaire - Fluides, Interfaces Liquides & Micro-Systèmes - IEMN [AIMAN-FILMS - IEMN]
Hage-Ali, Sami [Auteur]
Institut Jean Lamour [IJL]
Elmazria, Omar [Auteur]
Institut Jean Lamour [IJL]
Institut Jean Lamour [IJL]
Streque, Jérémy [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Hehn, Michel [Auteur]
Institut Jean Lamour [IJL]
Mengue, Prince [Auteur]
Institut Jean Lamour [IJL]
M'Jahed, Hamid [Auteur]
Institut Jean Lamour [IJL]
Lacour, Daniel [Auteur]
Institut Jean Lamour [IJL]
Dumesnil, Karine [Auteur]
Institut Jean Lamour [IJL]
Petit-Watelot, S. [Auteur]
Institut Jean Lamour [IJL]
Zhgoon, Sergei [Auteur]
Polewczyk, Vincent [Auteur]
Institut Jean Lamour [IJL]
Mazzamurro, Aurélien [Auteur]
Talbi, Abdelkrim [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Acoustique Impulsionnelle & Magnéto-Acoustique Non linéaire - Fluides, Interfaces Liquides & Micro-Systèmes - IEMN [AIMAN-FILMS - IEMN]
Hage-Ali, Sami [Auteur]
Institut Jean Lamour [IJL]
Elmazria, Omar [Auteur]
Institut Jean Lamour [IJL]
Journal title :
Smart Materials and Structures
Pages :
045036
Publisher :
IOP Publishing
Publication date :
2020-04-01
ISSN :
0964-1726
English keyword(s) :
SAW devices
resonators
piezoelectric
Love waves
magnetic field sensor
temperature compensated
resonators
piezoelectric
Love waves
magnetic field sensor
temperature compensated
HAL domain(s) :
Sciences de l'ingénieur [physics]
Sciences de l'ingénieur [physics]/Acoustique [physics.class-ph]
Sciences de l'ingénieur [physics]/Micro et nanotechnologies/Microélectronique
Sciences de l'ingénieur [physics]/Acoustique [physics.class-ph]
Sciences de l'ingénieur [physics]/Micro et nanotechnologies/Microélectronique
English abstract : [en]
A temperature compensated magnetic field sensor based on the combination of CoFeB ferromagnetic thin films and Quartz/ZnO Love waveguide platform is developed and optimized. The Love wave is a shear horizontal guided wave ...
Show more >A temperature compensated magnetic field sensor based on the combination of CoFeB ferromagnetic thin films and Quartz/ZnO Love waveguide platform is developed and optimized. The Love wave is a shear horizontal guided wave and therefore provides an optimal interaction with magnetisation in the magneto-elastic thin film resulting in higher acoustic wave magneto-elastic coupling compared to the conventional Rayleigh wave based devices. ST-cut Quartz was chosen as substrate, ZnO as insulating layer for Love wave generation and temperature coefficient of frequency (TCF) compensation and CoFeB as the magnetostrictive layer sensitive to magnetic field. Experimental results show a magneto-acoustic sensitivity of 15.53 MHz/T with almost zero TCF.Show less >
Show more >A temperature compensated magnetic field sensor based on the combination of CoFeB ferromagnetic thin films and Quartz/ZnO Love waveguide platform is developed and optimized. The Love wave is a shear horizontal guided wave and therefore provides an optimal interaction with magnetisation in the magneto-elastic thin film resulting in higher acoustic wave magneto-elastic coupling compared to the conventional Rayleigh wave based devices. ST-cut Quartz was chosen as substrate, ZnO as insulating layer for Love wave generation and temperature coefficient of frequency (TCF) compensation and CoFeB as the magnetostrictive layer sensitive to magnetic field. Experimental results show a magneto-acoustic sensitivity of 15.53 MHz/T with almost zero TCF.Show less >
Language :
Anglais
Popular science :
Non
ANR Project :
Source :
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