Integrated microfluidics based on multi-layered ...
Document type :
Compte-rendu et recension critique d'ouvrage
Title :
Integrated microfluidics based on multi-layered SU-8 for mass spectrometry analysis
Author(s) :
Carlier, Julien [Auteur]
Matériaux et Acoustiques pour MIcro et NAno systèmes intégrés - IEMN [MAMINA - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Arscott, Steve [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Thomy, Vincent [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Fourrier, J. [Auteur]
Caron, F. [Auteur]
Service des maladies infectieuses et tropicales [Rouen]
Camart, Jean-Christophe [Auteur]
Druon, C [Auteur]
Tabourier, P. [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]

Matériaux et Acoustiques pour MIcro et NAno systèmes intégrés - IEMN [MAMINA - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Arscott, Steve [Auteur]

Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Thomy, Vincent [Auteur]

Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Fourrier, J. [Auteur]
Caron, F. [Auteur]
Service des maladies infectieuses et tropicales [Rouen]
Camart, Jean-Christophe [Auteur]

Druon, C [Auteur]
Tabourier, P. [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Journal title :
Journal of Micromechanics and Microengineering
Pages :
619-624
Publisher :
IOP Publishing
Publication date :
2004-04-01
ISSN :
0960-1317
English keyword(s) :
Bond strength (materials)
Capillary tubes
Fluidics
Hydrodynamics
Mass spectrometry
Photoresistors
Pressure effects
Proteins
Capillary tubes
Fluidics
Hydrodynamics
Mass spectrometry
Photoresistors
Pressure effects
Proteins
HAL domain(s) :
Sciences de l'ingénieur [physics]
English abstract : [en]
We present a design for integrated lab-on-chip microsystems dedicated to mass spectrometry analysis based on the fabrication of watertight microchannels for the circulation of liquids. In this paper, we demonstrate how to ...
Show more >We present a design for integrated lab-on-chip microsystems dedicated to mass spectrometry analysis based on the fabrication of watertight microchannels for the circulation of liquids. In this paper, we demonstrate how to fabricate complete polymer microchannels using the negative photoresist SU-8 which has the advantage of being compatible with protein analysis by mass spectrometry. Our method of fabrication requires novel technological steps involving SU-8 multi-layer processing, improved SU-8 adhesion and the use of SU-8 wafer bonding for the watertight closing of the microchannels with a Pyrex wafer. This technique also encompasses the design of various microfluidic elements such as tapered recesses for the housing of capillary tubes allowing the connection of the channels to external systems. Following this, the capillary tubes were used to test the hydrodynamic behaviour of the channels and consequently the efficiency of our technological process in achieving fully watertight structures within our flow rate and pressure specifications.Show less >
Show more >We present a design for integrated lab-on-chip microsystems dedicated to mass spectrometry analysis based on the fabrication of watertight microchannels for the circulation of liquids. In this paper, we demonstrate how to fabricate complete polymer microchannels using the negative photoresist SU-8 which has the advantage of being compatible with protein analysis by mass spectrometry. Our method of fabrication requires novel technological steps involving SU-8 multi-layer processing, improved SU-8 adhesion and the use of SU-8 wafer bonding for the watertight closing of the microchannels with a Pyrex wafer. This technique also encompasses the design of various microfluidic elements such as tapered recesses for the housing of capillary tubes allowing the connection of the channels to external systems. Following this, the capillary tubes were used to test the hydrodynamic behaviour of the channels and consequently the efficiency of our technological process in achieving fully watertight structures within our flow rate and pressure specifications.Show less >
Language :
Anglais
Popular science :
Non
Source :
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