Legendre polynomial modeling of composite ...
Type de document :
Compte-rendu et recension critique d'ouvrage
DOI :
Titre :
Legendre polynomial modeling of composite bulk acoustic wave resonators
Auteur(s) :
Raherison, A. [Auteur]
Université de Fianarantsoa
Ratolojanahary, F.E. [Auteur]
Université de Fianarantsoa
Lefebvre, Jean-Etienne [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Elmaimouni, L. [Auteur]
Université Ibn Zohr [Ouarzazate] [UIZ]
Université de Fianarantsoa
Ratolojanahary, F.E. [Auteur]
Université de Fianarantsoa
Lefebvre, Jean-Etienne [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Elmaimouni, L. [Auteur]
Université Ibn Zohr [Ouarzazate] [UIZ]
Titre de la revue :
Journal of Applied Physics
Pagination :
014508
Éditeur :
American Institute of Physics
Date de publication :
2008
ISSN :
0021-8979
Discipline(s) HAL :
Sciences de l'ingénieur [physics]/Electronique
Résumé en anglais : [en]
The Legendre polynomial method has been extended to the modeling of bulk acoustic wave (BAW) resonators. Modifications have been made to the formulation in order to account for large differences in the physical properties ...
Lire la suite >The Legendre polynomial method has been extended to the modeling of bulk acoustic wave (BAW) resonators. Modifications have been made to the formulation in order to account for large differences in the physical properties of adjoining layers and to take into account the electric source. A unique formalism has been obtained which allows for both harmonic and modal analyses. Resonance and antiresonance frequencies, electric input impedance, electromechanical coupling coefficients, and quality factors have been obtained for an aluminum/zinc oxide/aluminum (Al∕ZnO∕Al) BAW resonator. The results are in excellent agreement with analytical results.Lire moins >
Lire la suite >The Legendre polynomial method has been extended to the modeling of bulk acoustic wave (BAW) resonators. Modifications have been made to the formulation in order to account for large differences in the physical properties of adjoining layers and to take into account the electric source. A unique formalism has been obtained which allows for both harmonic and modal analyses. Resonance and antiresonance frequencies, electric input impedance, electromechanical coupling coefficients, and quality factors have been obtained for an aluminum/zinc oxide/aluminum (Al∕ZnO∕Al) BAW resonator. The results are in excellent agreement with analytical results.Lire moins >
Langue :
Anglais
Vulgarisation :
Non
Source :
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