Near-field scanning millimeter-wave ...
Document type :
Compte-rendu et recension critique d'ouvrage
DOI :
Title :
Near-field scanning millimeter-wave microscope operating inside a scanning electron microscope: towards quantitative electrical nanocharacterization
Author(s) :
Polovodov, Petr [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Théron, Didier [Auteur]
Nano and Microsystems - IEMN [NAM6 - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Lenoir, Clément [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Deresmes, D. [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Plateforme de Caractérisation Multi-Physiques - IEMN [PCMP - IEMN]
Eliet, Sophie [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Plateforme de Caractérisation Multi-Physiques - IEMN [PCMP - IEMN]
Boyaval, Christophe [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Centrale de Micro Nano Fabrication - IEMN [CMNF - IEMN]
Dambrine, Gilles [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Haddadi, Kamel [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Circuits Systèmes Applications des Micro-ondes - IEMN [CSAM - IEMN ]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Théron, Didier [Auteur]
Nano and Microsystems - IEMN [NAM6 - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Lenoir, Clément [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Deresmes, D. [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Plateforme de Caractérisation Multi-Physiques - IEMN [PCMP - IEMN]
Eliet, Sophie [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Plateforme de Caractérisation Multi-Physiques - IEMN [PCMP - IEMN]
Boyaval, Christophe [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Centrale de Micro Nano Fabrication - IEMN [CMNF - IEMN]
Dambrine, Gilles [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Haddadi, Kamel [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Circuits Systèmes Applications des Micro-ondes - IEMN [CSAM - IEMN ]
Journal title :
Applied Sciences
Pages :
2788
Publisher :
Multidisciplinary digital publishing institute (MDPI)
Publication date :
2021
ISSN :
2076-3417
English keyword(s) :
Near-Field Scanning Microwave Microscopy
millimeter waves
standard operating procedure
electrical characterization
atomic force microscopy
scanning electron microscopy
millimeter waves
standard operating procedure
electrical characterization
atomic force microscopy
scanning electron microscopy
HAL domain(s) :
Sciences de l'ingénieur [physics]/Micro et nanotechnologies/Microélectronique
Physique [physics]/Physique [physics]/Instrumentations et Détecteurs [physics.ins-det]
Sciences de l'ingénieur [physics]/Matériaux
Physique [physics]/Physique [physics]/Instrumentations et Détecteurs [physics.ins-det]
Sciences de l'ingénieur [physics]/Matériaux
English abstract : [en]
The main objectives of this work are the development of fundamental extensions to the existing scanning microwave microscopy (SMM) technology to achieve quantitative complex impedance measurements at the nanoscale. We ...
Show more >The main objectives of this work are the development of fundamental extensions to the existing scanning microwave microscopy (SMM) technology to achieve quantitative complex impedance measurements at the nanoscale. We developed an SMM operating up to 67 GHz inside a scanning electron microscope giving unique advantages to tackle issues commonly found in open air SMMs. Operating in the millimeter-wave frequency range induces high collimation of the evanescent electrical fields in the vicinity of the probe apex resulting in high spatial resolution and enhanced sensitivity. Operating in vacuum allows for eliminating the water meniscus on tip apex that remains a critical issue to address modeling and quantitative analysis at the nanoscale. In addition, a microstrip probing structure has been developed to ensure a transverse electromagnetic mode as close as possible to the tip apex, reducing drastically radiation effects and parasitic apex to ground capacitances with available SMM probes. As a demonstration, we describe a standard operating procedure for instrumentation configuration, measurements and data analysis. Measurement performance is exemplary shown on a staircase microcapacitor sample at 30 GHz.Show less >
Show more >The main objectives of this work are the development of fundamental extensions to the existing scanning microwave microscopy (SMM) technology to achieve quantitative complex impedance measurements at the nanoscale. We developed an SMM operating up to 67 GHz inside a scanning electron microscope giving unique advantages to tackle issues commonly found in open air SMMs. Operating in the millimeter-wave frequency range induces high collimation of the evanescent electrical fields in the vicinity of the probe apex resulting in high spatial resolution and enhanced sensitivity. Operating in vacuum allows for eliminating the water meniscus on tip apex that remains a critical issue to address modeling and quantitative analysis at the nanoscale. In addition, a microstrip probing structure has been developed to ensure a transverse electromagnetic mode as close as possible to the tip apex, reducing drastically radiation effects and parasitic apex to ground capacitances with available SMM probes. As a demonstration, we describe a standard operating procedure for instrumentation configuration, measurements and data analysis. Measurement performance is exemplary shown on a staircase microcapacitor sample at 30 GHz.Show less >
Language :
Anglais
Popular science :
Non
ANR Project :
Source :
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