Fast X‐ray Nanotomography with Sub‐10 nm ...
Document type :
Compte-rendu et recension critique d'ouvrage
DOI :
Title :
Fast X‐ray Nanotomography with Sub‐10 nm Resolution as a Powerful Imaging Tool for Nanotechnology and Energy Storage Applications
Author(s) :
de Andrade, Vincent [Auteur correspondant]
Argonne National Laboratory [Lemont] [ANL]
Nikitin, Viktor [Auteur]
Argonne National Laboratory [Lemont] [ANL]
Wojcik, Michael [Auteur]
Argonne National Laboratory [Lemont] [ANL]
Deriy, Alex [Auteur]
Argonne National Laboratory [Lemont] [ANL]
Bean, Sunil [Auteur]
Argonne National Laboratory [Lemont] [ANL]
Shu, Deming [Auteur]
Argonne National Laboratory [Lemont] [ANL]
Mooney, Tim [Auteur]
Argonne National Laboratory [Lemont] [ANL]
Peterson, Kevin [Auteur]
Argonne National Laboratory [Lemont] [ANL]
Kc, Prabhat [Auteur]
Argonne National Laboratory [Lemont] [ANL]
Li, Kenan [Auteur]
Northwestern University [Evanston]
SLAC National Accelerator Laboratory [SLAC]
Ali, Sajid [Auteur]
Northwestern University [Evanston]
Fezzaa, Kamel [Auteur]
Argonne National Laboratory [Lemont] [ANL]
Gürsoy, Doga [Auteur]
Argonne National Laboratory [Lemont] [ANL]
Arico, Cassandra [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Centre interuniversitaire de recherche et d'ingenierie des matériaux [CIRIMAT]
Réseau sur le stockage électrochimique de l'énergie [RS2E]
Ouendi, Saliha [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Centrale de Micro Nano Fabrication - IEMN [CMNF - IEMN]
Troadec, David [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Centrale de Micro Nano Fabrication - IEMN [CMNF - IEMN]
Simon, Patrice [Auteur]
Centre interuniversitaire de recherche et d'ingenierie des matériaux [CIRIMAT]
de Carlo, Francesco [Auteur]
Advanced Photon Source [ANL] [APS]
Lethien, Christophe [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Circuits Systèmes Applications des Micro-ondes - IEMN [CSAM - IEMN ]
Réseau sur le stockage électrochimique de l'énergie [RS2E]
Argonne National Laboratory [Lemont] [ANL]
Nikitin, Viktor [Auteur]
Argonne National Laboratory [Lemont] [ANL]
Wojcik, Michael [Auteur]
Argonne National Laboratory [Lemont] [ANL]
Deriy, Alex [Auteur]
Argonne National Laboratory [Lemont] [ANL]
Bean, Sunil [Auteur]
Argonne National Laboratory [Lemont] [ANL]
Shu, Deming [Auteur]
Argonne National Laboratory [Lemont] [ANL]
Mooney, Tim [Auteur]
Argonne National Laboratory [Lemont] [ANL]
Peterson, Kevin [Auteur]
Argonne National Laboratory [Lemont] [ANL]
Kc, Prabhat [Auteur]
Argonne National Laboratory [Lemont] [ANL]
Li, Kenan [Auteur]
Northwestern University [Evanston]
SLAC National Accelerator Laboratory [SLAC]
Ali, Sajid [Auteur]
Northwestern University [Evanston]
Fezzaa, Kamel [Auteur]
Argonne National Laboratory [Lemont] [ANL]
Gürsoy, Doga [Auteur]
Argonne National Laboratory [Lemont] [ANL]
Arico, Cassandra [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Centre interuniversitaire de recherche et d'ingenierie des matériaux [CIRIMAT]
Réseau sur le stockage électrochimique de l'énergie [RS2E]
Ouendi, Saliha [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Centrale de Micro Nano Fabrication - IEMN [CMNF - IEMN]
Troadec, David [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Centrale de Micro Nano Fabrication - IEMN [CMNF - IEMN]
Simon, Patrice [Auteur]
Centre interuniversitaire de recherche et d'ingenierie des matériaux [CIRIMAT]
de Carlo, Francesco [Auteur]
Advanced Photon Source [ANL] [APS]
Lethien, Christophe [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Circuits Systèmes Applications des Micro-ondes - IEMN [CSAM - IEMN ]
Réseau sur le stockage électrochimique de l'énergie [RS2E]
Journal title :
Advanced Materials
Pages :
2008653
Publisher :
Wiley-VCH Verlag
Publication date :
2021-05
ISSN :
0935-9648
English keyword(s) :
batteries
nanolithography
nanotomography
synchrotrons
transmission X-ray microscopy
X-rays
nanolithography
nanotomography
synchrotrons
transmission X-ray microscopy
X-rays
HAL domain(s) :
Sciences de l'ingénieur [physics]
English abstract : [en]
In the last decade, transmission X-ray microscopes (TXMs) have come into operation in most of the synchrotrons worldwide. They have proven to be outstanding tools for non-invasive ex and in situ 3D characterization of ...
Show more >In the last decade, transmission X-ray microscopes (TXMs) have come into operation in most of the synchrotrons worldwide. They have proven to be outstanding tools for non-invasive ex and in situ 3D characterization of materials at the nanoscale across varying range of scientific applications. However, their spatial resolution has not improved in many years, while newly developed functional materials and microdevices with enhanced performances exhibit nanostructures always finer. Here, optomechanical breakthroughs leading to fast 3D tomographic acquisitions (85 min) with sub-10 nm spatial resolution, narrowing the gap between X-ray and electron microscopy, are reported. These new achievements are first validated with 3D characterizations of nanolithography objects corresponding to ultrahigh-aspect-ratio hard X-ray zone plates. Then, this powerful technique is used to investigate the morphology and conformality of nanometer-thick film electrodes synthesized by atomic layer deposition and magnetron sputtering deposition methods on 3D silicon scaffolds for electrochemical energy storage applications.Show less >
Show more >In the last decade, transmission X-ray microscopes (TXMs) have come into operation in most of the synchrotrons worldwide. They have proven to be outstanding tools for non-invasive ex and in situ 3D characterization of materials at the nanoscale across varying range of scientific applications. However, their spatial resolution has not improved in many years, while newly developed functional materials and microdevices with enhanced performances exhibit nanostructures always finer. Here, optomechanical breakthroughs leading to fast 3D tomographic acquisitions (85 min) with sub-10 nm spatial resolution, narrowing the gap between X-ray and electron microscopy, are reported. These new achievements are first validated with 3D characterizations of nanolithography objects corresponding to ultrahigh-aspect-ratio hard X-ray zone plates. Then, this powerful technique is used to investigate the morphology and conformality of nanometer-thick film electrodes synthesized by atomic layer deposition and magnetron sputtering deposition methods on 3D silicon scaffolds for electrochemical energy storage applications.Show less >
Language :
Anglais
Popular science :
Non
ANR Project :
Source :
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