Scanning microwave microscopy for ...
Document type :
Communication dans un congrès avec actes
Title :
Scanning microwave microscopy for investigations of mechanical vibrations and mode coupling
Author(s) :
Zhou, Xin [Auteur]
Théron, Didier [Auteur]
Nano and Microsystems - IEMN [NAM6 - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Xu, H. [Auteur]
Boyaval, Christophe [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Centrale de Micro Nano Fabrication - IEMN [CMNF - IEMN]
Eliet, Sophie [Auteur]
Plateforme de Caractérisation Multi-Physiques - IEMN [PCMP - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Tilmant, Pascal [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Centrale de Micro Nano Fabrication - IEMN [CMNF - IEMN]

Théron, Didier [Auteur]

Nano and Microsystems - IEMN [NAM6 - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Xu, H. [Auteur]
Boyaval, Christophe [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Centrale de Micro Nano Fabrication - IEMN [CMNF - IEMN]
Eliet, Sophie [Auteur]
Plateforme de Caractérisation Multi-Physiques - IEMN [PCMP - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Tilmant, Pascal [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Centrale de Micro Nano Fabrication - IEMN [CMNF - IEMN]
Conference title :
Frontiers of Nanomechanical Systems
City :
Delft
Country :
Pays-Bas
Start date of the conference :
2023-06-06
English keyword(s) :
Scanning microwave microscopy
membrane
nanomechanical vibration
membrane
nanomechanical vibration
HAL domain(s) :
Sciences de l'ingénieur [physics]
English abstract : [en]
In recent years, scanning probe microscopy has attracted interests for dielectric property characterization at the nanoscale of a wide range of materials due to its capability to measure aF scale capacitances or variations ...
Show more >In recent years, scanning probe microscopy has attracted interests for dielectric property characterization at the nanoscale of a wide range of materials due to its capability to measure aF scale capacitances or variations [1]. For this reason, it can be exploited to manipulate nanomechanical vibrations of NEMS/MEMS [2]. In this work, we present a novel platform of scanning microwave microscopy for manipulating and detecting mechanical vibrations of nanoelectromechanical resonators. In this platform, a metallic AFM (atomic force microscopy) tip is placed on the top of a silicon nitride membrane nanoelectromechanical resonator, acting as a movable top-gate of the coupled membrane resonator. Microwave interferometry is exploited to read out mechanical motions [3]. In this setup, all electrical signals pass through the tip and the membrane is simply connected to the ground.Based on this platform, we present 3-dimensional spatial maps of the several mechanical modes (see Figure 1 for the fundamental one) and mechanical damping rates by leveraging high resolutions of AFM setup. Besides, we also demonstrate mode coupling between the fundamental mode of the AFM tip (with resonance frequency ~ 15 kHz) and the fundamental mode of the silicon nitride membrane (~ 8 MHz). It allows to manipulate electromechanically induced transparency and amplification of the input signals of both coupled modes through sideband pumping the membrane resonator [4]. This platform facilitates studies of nanoscale mechanical resonators (e.g. carbon nanotube mechanical resonators) and mechanical dissipations, and brings conveniences in manipulating vibration modes located at different positions in suspended structures. [1] Alexander Tselev, IEEE Microwave, (2020) 21(10) pp. 72‑86,[2] David Hälg, Thomas Gisler, Eric C. Langman, Shobhna Misra, Oded Zilberberg, Albert Schliesser, Christian L. Degen, and Alexander Eichler, Strong Parametric Coupling between Two Ultracoherent Membrane Modes, Phys. Rev. Lett. 128, 094301 – Published 1 March 2022[3] Xin Zhou, Srisaran Venkatachalam, Ronghua Zhou, Hao Xu, Alok Pokharel, Andrew Fefferman, Mohammed Zaknoune, and Eddy Collin. High-Q Silicon Nitride Drum Resonators Strongly Coupled to Gates. Nano Lett. (2021) 21, 5738–5744 [4] Alok Pokharel, Hao Xu, Srisaran Venkatachalam, Eddy Collin, Xin Zhou. Coupling Capacitively Distinct Mechanical Resonators for Room-Temperature Phonon-Cavity Electromechanics. Nano Lett. (2022), 22 (18), 7351-7357.Show less >
Show more >In recent years, scanning probe microscopy has attracted interests for dielectric property characterization at the nanoscale of a wide range of materials due to its capability to measure aF scale capacitances or variations [1]. For this reason, it can be exploited to manipulate nanomechanical vibrations of NEMS/MEMS [2]. In this work, we present a novel platform of scanning microwave microscopy for manipulating and detecting mechanical vibrations of nanoelectromechanical resonators. In this platform, a metallic AFM (atomic force microscopy) tip is placed on the top of a silicon nitride membrane nanoelectromechanical resonator, acting as a movable top-gate of the coupled membrane resonator. Microwave interferometry is exploited to read out mechanical motions [3]. In this setup, all electrical signals pass through the tip and the membrane is simply connected to the ground.Based on this platform, we present 3-dimensional spatial maps of the several mechanical modes (see Figure 1 for the fundamental one) and mechanical damping rates by leveraging high resolutions of AFM setup. Besides, we also demonstrate mode coupling between the fundamental mode of the AFM tip (with resonance frequency ~ 15 kHz) and the fundamental mode of the silicon nitride membrane (~ 8 MHz). It allows to manipulate electromechanically induced transparency and amplification of the input signals of both coupled modes through sideband pumping the membrane resonator [4]. This platform facilitates studies of nanoscale mechanical resonators (e.g. carbon nanotube mechanical resonators) and mechanical dissipations, and brings conveniences in manipulating vibration modes located at different positions in suspended structures. [1] Alexander Tselev, IEEE Microwave, (2020) 21(10) pp. 72‑86,[2] David Hälg, Thomas Gisler, Eric C. Langman, Shobhna Misra, Oded Zilberberg, Albert Schliesser, Christian L. Degen, and Alexander Eichler, Strong Parametric Coupling between Two Ultracoherent Membrane Modes, Phys. Rev. Lett. 128, 094301 – Published 1 March 2022[3] Xin Zhou, Srisaran Venkatachalam, Ronghua Zhou, Hao Xu, Alok Pokharel, Andrew Fefferman, Mohammed Zaknoune, and Eddy Collin. High-Q Silicon Nitride Drum Resonators Strongly Coupled to Gates. Nano Lett. (2021) 21, 5738–5744 [4] Alok Pokharel, Hao Xu, Srisaran Venkatachalam, Eddy Collin, Xin Zhou. Coupling Capacitively Distinct Mechanical Resonators for Room-Temperature Phonon-Cavity Electromechanics. Nano Lett. (2022), 22 (18), 7351-7357.Show less >
Language :
Anglais
Peer reviewed article :
Oui
Audience :
Internationale
Popular science :
Non
ANR Project :
Source :