Titre :

Interdigitated-comb piezoelectric phononic crystals for innovative SAW devices

Auteur(s) :

Alcorta Galván, R. [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Croenne, Charles [Auteur]
Acoustique - IEMN [ACOUSTIQUE - IEMN]
Dubus, Bertrand [Auteur]
Acoustique - IEMN [ACOUSTIQUE - IEMN]
Eustache, E. [Auteur]
Thales Research and Technology [Palaiseau]
Ngabonziza, A. [Auteur]
Thales Research and Technology [Palaiseau]
Hladky, Anne-Christine [Auteur]
Acoustique - IEMN [ACOUSTIQUE - IEMN]

Titre de la revue :

Applied Physics Letters

Pagination :

121703

Éditeur :

American Institute of Physics

Date de publication :

2024

ISSN :

0003-6951

Discipline(s) HAL :

Sciences de l'ingénieur [physics]/Micro et nanotechnologies/Microélectronique
Sciences de l'ingénieur [physics]/Acoustique [physics.class-ph]

Résumé en anglais : [en]

In this paper, piezoelectric phononic crystals made up of interdigitated combs in floating potential condition are studied. Calculation of the dispersion curves shows that, in addition to Bragg bandgaps due to the presence ...
Lire la suite >In this paper, piezoelectric phononic crystals made up of interdigitated combs in floating potential condition are studied. Calculation of the dispersion curves shows that, in addition to Bragg bandgaps due to the presence of periodic electrodes, supplementary bandgaps are present corresponding to electrical resonance/antiresonance of the comb pairs. Calculation of the reflection coefficient of finite-sized mirrors reveals the presence of high amplitude reflection coefficient lobes near these bandgap frequencies. The electrical response of single port resonators using these interdigitated comb mirrors fabricated with Al metallization on LiTaO3 POI substrate is contrasted with that of a resonator with classical mirrors, providing experimental verification of this mechanism for bandgap opening. Possible applications for SAW device design are finally discussed.Lire moins >

Langue :

Anglais

Comité de lecture :

Oui

Audience :

Internationale

Vulgarisation :

Non

Projet ANR :

Filtres phOnoniques Radiofréquences MicrO-uSinés Agiles

Collections :

• Institut d'Électronique, de Microélectronique et de Nanotechnologie (IEMN) - UMR 8520

Source :

Harvested from HAL

Date de dépôt :

2024-10-16T03:42:00Z