Structural and optical properties of n-propoxide sol-gel derived ZrO<sub>2</sub> thin films

Ehrhart, G.; Capoen, Bruno; Robbe, O.; Boy, Ph.; Turrell, S.; Bouazaoui, M.

Type de document :

Article dans une revue scientifique: Article original

DOI :

10.1016/j.tsf.2005.08.309

Titre :

Structural and optical properties of n-propoxide sol-gel derived ZrO<sub>2</sub> thin films

Auteur(s) :

Ehrhart, G. [Auteur]
Laboratoire Avancé de Spectroscopie pour les Intéractions la Réactivité et l'Environnement - UMR 8516 [LASIRE]
Capoen, Bruno [Auteur]

Laboratoire de Physique des Lasers, Atomes et Molécules - UMR 8523 [PhLAM]
Robbe, O. [Auteur]
Laboratoire Avancé de Spectroscopie pour les Intéractions la Réactivité et l'Environnement - UMR 8516 [LASIRE]
Boy, Ph. [Auteur]
Turrell, S. [Auteur]
Laboratoire Avancé de Spectroscopie pour les Intéractions la Réactivité et l'Environnement - UMR 8516 [LASIRE]
Bouazaoui, M. [Auteur]
Laboratoire de Physique des Lasers, Atomes et Molécules - UMR 8523 [PhLAM]

Titre de la revue :

Thin Solid Films

Pagination :

227-233

Éditeur :

Elsevier

Date de publication :

2006

ISSN :

0040-6090

Résumé en anglais : [en]

In this work, we present a sol–gel method for the preparation of zirconia films. Using zirconium n-propoxide as the starting precursor, a ZrO2 sol has been synthesized that remains stable for several months. Thin films ...
Lire la suite >In this work, we present a sol–gel method for the preparation of zirconia films. Using zirconium n-propoxide as the starting precursor, a ZrO2 sol has been synthesized that remains stable for several months. Thin films were deposited using the dip-coating method. The structural characterization was performed using waveguide Raman spectroscopy. The films present an amorphous phase up to an annealing temperature of 400 °C. Both monoclinic and tetragonal phases were obtained for annealing temperatures higher than 450 °C. The proportions of these two phases were calculated from the Raman spectra and the size of the crystallites was evaluated using the low-wavenumber Raman band. The optical properties were characterized by the m-lines technique (n = 1.96) and UV–visible spectroscopy. The optical losses for a TE0 mode were measured to be 0.29 ± 0.03 dB cm− 1 for a sample annealed at 400 °C. To optimize the protocol for thermal annealing, a powder obtained from a dried sol was characterized by Thermal Gravimetric Analysis. Rutherford Back Scattering was employed to determine the chemical composition and the stoichiometry of the zirconia films.Lire moins >

Langue :

Anglais

Comité de lecture :

Oui

Audience :

Non spécifiée

Vulgarisation :

Non

Collections :