Title :

Development of broadband high-frequency piezoelectric micromachined ultrasonic transducer array

Author(s) :

Wang, Xu-Bo [Auteur]
State Key Laboratory of ASIC and System
He, Le-Ming [Auteur]
State Key Laboratory of ASIC and System
Ma, You-Cao [Auteur]
State Key Laboratory of ASIC and System
Liu, Wen-Juan [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Matériaux et Acoustiques pour MIcro et NAno systèmes intégrés - IEMN [MAMINA - IEMN]
State Key Laboratory of ASIC and System
Xu, Wei Jiang [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Transduction, Propagation et Imagerie Acoustique - IEMN [TPIA - IEMN]
Ren, Jun-Yan [Auteur]
State Key Laboratory of ASIC and System
Riaud, Antoine [Auteur]
State Key Laboratory of ASIC and System
Zhou, Jia [Auteur]
State Key Laboratory of ASIC and System

Journal title :

Sensors

Pages :

1823

Publisher :

MDPI

Publication date :

2021

ISSN :

1424-8220

English keyword(s) :

PDMS
PZT
PMUT
high-frequency
wide bandwidth
micromachining
two-dimensional array
rangefinder

HAL domain(s) :

Sciences de l'ingénieur [physics]/Micro et nanotechnologies/Microélectronique
Sciences de l'ingénieur [physics]
Sciences de l'ingénieur [physics]/Matériaux
Sciences de l'ingénieur [physics]/Acoustique [physics.class-ph]
Informatique [cs]
Physique [physics]

English abstract : [en]

Piezoelectric micromachined ultrasonic transducers (PMUT) are promising elements to fabricate a two-dimensional (2D) array with a pitch small enough (approximately half wavelength) to form and receive arbitrary acoustic ...
Show more >Piezoelectric micromachined ultrasonic transducers (PMUT) are promising elements to fabricate a two-dimensional (2D) array with a pitch small enough (approximately half wavelength) to form and receive arbitrary acoustic beams for medical imaging. However, PMUT arrays have so far failed to combine the wide, high-frequency bandwidth needed to achieve a high axial resolution. In this paper, a polydimethylsiloxane (PDMS) backing structure is introduced into the PMUTs to improve the device bandwidth while keeping a sub-wavelength (λ) pitch. We implement this backing on a 16 × 8 array with 75 µm pitch (3λ/4) with a 15 MHz working frequency. Adding the backing nearly doubles the bandwidth to 92% (−6 dB) and has little influence on the impulse response sensitivity. By widening the transducer bandwidth, this backing may enable using PMUT ultrasonic arrays for high-resolution 3D imaging.Show less >

Language :

Anglais

Popular science :

Non

Collections :

• Institut d'Électronique, de Microélectronique et de Nanotechnologie (IEMN) - UMR 8520

Source :

Harvested from HAL