Title :

Multimodal microscopy test standard for scanning microwave, electron, force and optical microscopy

Author(s) :

Haenssler, Olaf C. [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Wieghaus, M. F. [Auteur]
Kostopoulos, A. [Auteur]
Doundoulakis, G. [Auteur]
Aperathitis, E. [Auteur]
Fatikow, S. [Auteur]
Kiriakidis, G. [Auteur]

Journal title :

Journal of Micro-Bio Robotics

Pages :

51-57

Publisher :

Springer

Publication date :

2018

ISSN :

2194-6418

HAL domain(s) :

Sciences de l'ingénieur [physics]

English abstract : [en]

We report on measurement results of a test standard suitable for different microscopic modalities. These findings were obtained by a multimodal hybrid microscope, which requires various calibration methods, also in terms ...
Show more >We report on measurement results of a test standard suitable for different microscopic modalities. These findings were obtained by a multimodal hybrid microscope, which requires various calibration methods, also in terms of its further use as a tool in a nanorobotic environment. A Scanning Probe Microscopy (SPM)-Controller based on an FPGA (Field Programmable Gate Array) enables the submicrometer imaging for atomic force and microwave microscopic modalities. It is embedded in an open source software framework for nanorobotics and -automation and is described in this report.Show less >

Language :

Anglais

Popular science :

Non

Collections :

• Institut d'Électronique, de Microélectronique et de Nanotechnologie (IEMN) - UMR 8520

Source :

Harvested from HAL