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Optimization of surface treatment on MEMS ...
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Document type :
Article dans une revue scientifique
DOI :
10.18494/SAM.2019.2322
Title :
Optimization of surface treatment on MEMS probes for single-cell capture and release
Author(s) :
Hayashi, Kensaku [Auteur]
Tokyo City University
Kumemura, Momoko [Auteur]
The University of Tokyo [UTokyo]
Kaneda, Shohei [Auteur]
The University of Tokyo [UTokyo]
Menon, Vivek [Auteur]
The University of Tokyo [UTokyo]
Jalabert, Laurent [Auteur]
Laboratory for Integrated Micro Mechatronics Systems [LIMMS]
Tachikawa, Saeko [Auteur]
The University of Tokyo [UTokyo]
Tarhan, Mehmet [Auteur]
Bio-Micro-Electro-Mechanical Systems - IEMN [BIOMEMS - IEMN]
Yncréa Hauts-de-France
Fujii, Teruo [Auteur]
The University of Tokyo [UTokyo]
Kim, Beomjoon [Auteur]
The University of Tokyo [UTokyo]
Fujita, Hiroyuki [Auteur]
The University of Tokyo [UTokyo]
Journal title :
Sensors and Materials
Pages :
2873
Publisher :
Myu scientific publishing
Publication date :
2019
ISSN :
0914-4935
English keyword(s) :
MEMS tweezers
cell handling
single-cell trapping
surface modification
surface treatment
HAL domain(s) :
Sciences de l'ingénieur [physics]/Micro et nanotechnologies/Microélectronique
English abstract : [en]
Micro-electromechanical systems (MEMS) tweezers developed for the trapping and characterization of bio molecules such as DNA are also capable of cell handling, which will enable further application involving single cell ...
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Micro-electromechanical systems (MEMS) tweezers developed for the trapping and characterization of bio molecules such as DNA are also capable of cell handling, which will enable further application involving single cell characterization. However, cellular adhesion to Si tweezers surfaces can inhibit the release of cells after capture and analysis. To allow for high-throughput cell handling, the surface modification process for probe sidewalls was optimized. The hydrophilicity of sample silicon wafers modified with various chemical coatings was measured to identify the optimal process. The surface modification was then applied to MEMS probes and the feasibility of cell capture/release was evaluated.Show less >
Language :
Anglais
Peer reviewed article :
Oui
Audience :
Internationale
Popular science :
Non
Collections :
  • Institut d'Électronique, de Microélectronique et de Nanotechnologie (IEMN) - UMR 8520
Source :
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