Titre :

High Q THz photonic crystal cavity on a low loss suspended Silicon platform

Auteur(s) :

Akiki, Elias [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Faucher, Marc [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Vanwolleghem, Mathias [Auteur]
Photonique THz - IEMN [PHOTONIQUE THZ - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Verstuyft, Mattias [Auteur]
Universiteit Gent = Ghent University = Université de Gand [UGENT]
Kuyken, Bart [Auteur]
Universiteit Gent = Ghent University = Université de Gand [UGENT]
Walter, Benjamin [Auteur]
Vmicro SAS
Lampin, Jean-Francois [Auteur]
Photonique THz - IEMN [PHOTONIQUE THZ - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Ducournau, Guillaume [Auteur]
Photonique THz - IEMN [PHOTONIQUE THZ - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]

Titre de la revue :

IEEE Transactions on Terahertz Science and Technology

Pagination :

1-1

Éditeur :

Institute of Electrical and Electronics Engineers

Date de publication :

2020-08-27

ISSN :

2156-342X

Mot(s)-clé(s) en anglais :

THz waveguide
THz photonic crystal cavity
high resistivity Silicon
Quality factor
propagation losses

Discipline(s) HAL :

Sciences de l'ingénieur [physics]

Résumé en anglais : [en]

In this work, we present an ultra-high Q cavity at Terahertz (THz) frequencies. The designed cavity is built on a low loss suspended silicon (Si) waveguide. The substrate removal under the waveguide and the use of optimized ...
Lire la suite >In this work, we present an ultra-high Q cavity at Terahertz (THz) frequencies. The designed cavity is built on a low loss suspended silicon (Si) waveguide. The substrate removal under the waveguide and the use of optimized deep reactive ion etching processing is the main reason for observing very low losses of this design α< 0.09 dB/mm. This very low loss behavior of this designed platform is also demonstrated by the measurement of a 1D photonic wire crystal cavity with Q>18000. Different cavity layouts are adjusted in order to maximize the transmittance while maintaining high Q. A design with reduced number of etched crystal holes achieve a Q>1500 and high transmittance T>70%. These structures are presented at sub-mm waves (around 600GHz) for the design of a gas sensor in this frequency region, but the principles can be scaled and redesigned for other frequencies in the THz band.Lire moins >

Langue :

Anglais

Vulgarisation :

Non

Projet Européen :

INTERREG TERAFOOD

Collections :

• Institut d'Électronique, de Microélectronique et de Nanotechnologie (IEMN) - UMR 8520

Source :

Harvested from HAL