Titre :

Statics and dynamics in giant magnetostrictive Tbx/Fe(1-x)/-Fe0.6Co0.4 multilayers for MEMS

Auteur(s) :

Youssef, Jamal Ben [Auteur]
Laboratoire de magnétisme de Bretagne [LMB]
Tiercelin, Nicolas [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Petit, Fabienne [Auteur]
Gall, Henri Le [Auteur]
Laboratoire de magnétisme de Bretagne [LMB]
Preobrazhensky, Vladimir [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Pernod, Philippe [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]

Titre de la revue :

IEEE Transactions on Magnetics

Pagination :

2817-2819

Éditeur :

Institute of Electrical and Electronics Engineers

Date de publication :

2002-09

ISSN :

0018-9464

Mot(s)-clé(s) en anglais :

giant magnetostriction
thin films
multilayer
spin reorientation transition
dynamics
actuators

Discipline(s) HAL :

Sciences de l'ingénieur [physics]/Micro et nanotechnologies/Microélectronique
Sciences de l'ingénieur [physics]
Sciences de l'ingénieur [physics]/Matériaux

Résumé en anglais : [en]

In the present paper, giant magnetostric-tive thin films have been investigated for future micro-electromechanical systems (MEMS) purposes. For this goal, flexural and torsional motions have been studied in low field ...
Lire la suite >In the present paper, giant magnetostric-tive thin films have been investigated for future micro-electromechanical systems (MEMS) purposes. For this goal, flexural and torsional motions have been studied in low field anisotropic giant magnetostrictive (GMS) single domain state (SDS) exchange-coupled TbFe/FeCo multilay-ers (ECML). The magnetoelastic (ME) coefficient b γ,2 depend strongly on the ECML structures, compositions, and sputtering deposition parameters. Giant magnetostrictive Multilayers with a high b γ,2 (18M P a for T bF e 2 /F e 0.6 Co 0.4 compared to 11M P a for T bF e 2 /F e) were obtained with or without an in-plane easy axis with a controlled direction, and without any annealing post-process. Dynamical excita-tions of the actuators have been investigated under various conditions. An enhancement up to a factor 5 of the oscillations compared to the TbFe/Fe multilayers is observed with the possibility to tune the flexural/torsional dynami-cal behavior of these cantilevers. The corresponding very large dynamical ME susceptibility of these improved uni-axial ECML gives the possibility to control GMS MEMS with further reduction of the excitation field down to a few oersteds.Lire moins >

Langue :

Anglais

Vulgarisation :

Non

Collections :

• Institut d'Électronique, de Microélectronique et de Nanotechnologie (IEMN) - UMR 8520

Source :

Harvested from HAL