Titre :

Ultrathin electrochemically driven conducting polymer actuators: fabrication and electrochemomechanical characterization

Auteur(s) :

Nguyen, Ngoc Tan [Auteur]
Matériaux et Acoustiques pour MIcro et NAno systèmes intégrés - IEMN [MAMINA - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - Département Opto-Acousto-Électronique - UMR 8520 [IEMN-DOAE]
Rohtlaid, Kätlin [Auteur]
Laboratoire de Physico-chimie des Polymères et des Interfaces [LPPI]
Plesse, Cedric [Auteur]
Laboratoire de Physico-chimie des Polymères et des Interfaces [LPPI]
Nguyen, Giao T.M. [Auteur]
Laboratoire de Physico-chimie des Polymères et des Interfaces [LPPI]
Soyer, Caroline [Auteur]
Matériaux et Acoustiques pour MIcro et NAno systèmes intégrés - IEMN [MAMINA - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - Département Opto-Acousto-Électronique - UMR 8520 [IEMN-DOAE]
Grondel, Sebastien [Auteur]
INSA Institut National des Sciences Appliquées Hauts-de-France [INSA Hauts-De-France]
Matériaux et Acoustiques pour MIcro et NAno systèmes intégrés - IEMN [MAMINA - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - Département Opto-Acousto-Électronique - UMR 8520 [IEMN-DOAE]
Cattan, Eric [Auteur]
Matériaux et Acoustiques pour MIcro et NAno systèmes intégrés - IEMN [MAMINA - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - Département Opto-Acousto-Électronique - UMR 8520 [IEMN-DOAE]
Madden, John D.W. [Auteur]
University of British Columbia [Canada] [UBC]
Vidal, Frederic [Auteur]
Laboratoire de Physico-chimie des Polymères et des Interfaces [LPPI]

Titre de la revue :

Electrochimica Acta

Pagination :

670-680

Éditeur :

Elsevier

Date de publication :

2018-03-01

ISSN :

0013-4686

Mot(s)-clé(s) en anglais :

Layer by layer method
Vapor phase polymerization
Volumetric capacitance
Electronic conductivity
Ionic conductivity
Force generation
Bending actuation
PEDOT-based actuators

Discipline(s) HAL :

Sciences de l'ingénieur [physics]/Micro et nanotechnologies/Microélectronique
Chimie/Polymères

Résumé en anglais : [en]

Electronic conducting polymer based-actuators have attracted lots of interest as alternative materials to traditional piezoelectric and electrostatic actuators. Their specific characteristics such as their low operating ...
Lire la suite >Electronic conducting polymer based-actuators have attracted lots of interest as alternative materials to traditional piezoelectric and electrostatic actuators. Their specific characteristics such as their low operating voltages and large strains should allow them to adapt better to soft microstructures. Recently, poly (3,4-ethylenedioxythiophene) (PEDOT) – based ionic actuators have overcome some initial stumbling blocks to widespread applications in the microfabricated devices field. These trilayer bending microactuators were fabricated (i) by sequential stacking, using a layer by layer polymerization (LbL) of conducting polymer electrodes and a solid polymer electrolyte and (ii) by micro-patterning, using standard microsystems processes. While microfabrication processing of a trilayer actuator, involving no manual handling has been demonstrated, their bending performances remain limited for practical applications. Moreover, the complete characterization of their electrical, electrochemical, and mechanical properties has never been investigated. This paper describes the optimization of PEDOT electroactive electrodes synthesized with a vapor phase polymerization process. Influence of synthesis parameters on thickness, electronic conductivity and volumetric charge density were studied to determine the guidelines for synthesizing highly efficient electrodes. Afterwards, these parameters are used to guide the LbL synthesis process of ultrathin trilayer actuators. Electrochemical and mechanical properties of the resulting microactuators have been thoroughly characterized. Bending deformation and output force generation have been measured and reached 0.5% and 11 μN respectively. This constitutes the first characterization of ionic PEDOT-based microactuators operating in air of such a thin thickness (11 μm dry and 18.3 μm swelled in 1-Ethyl-3-methylimidazolium bis(fluorosulfonyl)imide (EMImTFSI)). These actuators and their actuation properties are promising for future soft microsystem devices where the use of polymer actuators should be essential.Lire moins >

Langue :

Anglais

Comité de lecture :

Oui

Audience :

Internationale

Vulgarisation :

Non

Projet ANR :

Plateforme de traitement laser pour l'électronique flexible multifonctionnelle

Commentaire :

JIF=5.383

Collections :

• Institut d'Électronique, de Microélectronique et de Nanotechnologie (IEMN) - UMR 8520

Source :

Harvested from HAL