Ultimate integration of a PDMS-based lab-on-a-chip with nanotransistor biosensors

Clément, N.

Type de document :

Autre communication scientifique (congrès sans actes - poster - séminaire...): Communication dans un congrès avec actes

Titre :

Ultimate integration of a PDMS-based lab-on-a-chip with nanotransistor biosensors

Auteur(s) :

Clément, N. [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]

Titre de la manifestation scientifique :

Annual Meeting of GDR MicroNanoSystèmes and MicroNanoFluidique - Microfluidic Engineering of Smart Materials

Ville :

Bordeaux

Pays :

France

Date de début de la manifestation scientifique :

2013

Résumé en anglais : [en]

Silicon nanowire, carbon nanotube, and graphene nanoribbon field-effect transistors have attracted substantial interest for various ionic and biochemical sensing applications. Although the nanotransistor itself is very ...
Lire la suite >Silicon nanowire, carbon nanotube, and graphene nanoribbon field-effect transistors have attracted substantial interest for various ionic and biochemical sensing applications. Although the nanotransistor itself is very small, coupled electronic / microfluidic devices are typically in the centimeter range. This increased dimensionality arises from the difficulty in obtaining electrical contacts close to the channel, leading to extra costs, increased processing time, and poor integration. Here, we address the question of the maximum integration possible for such PDMS-based labs-on-chips (LoCs). We observed a critical PDMS wall dimension between the channel and the electrical contacts that set the limit of integration and below which we observed leakage. We derived an analytical formula for the critical pressure as a function of the PDMS wall dimension. Furthermore, we introduce a simple and inexpensive technique for aligning a PDMS layer onto a nanotransistor with 1-μm precision. Finally, we demonstrate the parallel fabrication of a 1.5 mm x 1.5 mm LoC, including the electrical contacts and tubing. Using these microfluidic channels, we discuss the full Nernstian response to NaCl with zero dimensional silicon nanotransistor biosensors.Lire moins >

Langue :

Anglais

Comité de lecture :

Oui

Audience :

Non spécifiée

Vulgarisation :

Non

Collections :

Institut d'Électronique, de Microélectronique et de Nanotechnologie (IEMN) - UMR 8520

Source :

Harvested from HAL

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