Rotational temperatures in RF plasma of ...

Document type :
Communication dans un congrès avec actes
Title :
Rotational temperatures in RF plasma of Ar-H2O mixtures at low and moderated pressure
Author(s) :
Annusova, Adriana [Auteur]
Department of Experimental Physics [UNIBA Bratislava]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Krištof, Jaroslav [Auteur]
Department of Experimental Physics [UNIBA Bratislava]
Foissac, Corinne [Auteur] refId
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Veis, Pavel [Auteur]
Department of Experimental Physics [UNIBA Bratislava]
Supiot, Philippe [Auteur] refId
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Conference title :
XXXI International Conference on Phenomena in Ionized Gases, XXXI ICPIG
City :
Granada
Country :
Espagne
Start date of the conference :
2013
Book title :
Proceedings of XXXI International Conference on Phenomena in Ionized Gases, XXXI ICPIG
Publication date :
2013
HAL domain(s) :
Sciences de l'ingénieur [physics]
English abstract : [en]
An Ar-H2O discharge with Ar content from 0 to 95 % at 67 and 266 Pa have been studied by optical emission spectroscopy. The plasma was excited at 27 MHz by a helical cavity with a power set at 30 W. The rotational temperatures ...
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Language :
Anglais
Peer reviewed article :
Oui
Audience :
Non spécifiée
Popular science :
Non
Collections :
Source :
Harvested from HAL