Titre :

Piezoelectric MEMS : harmonic and modal analysis response of resonators hollow cylinder

Auteur(s) :

Elmaimouni, L. [Auteur]
Lefebvre, Jean-Etienne [Auteur]
Matériaux et Acoustiques pour MIcro et NAno systèmes intégrés - IEMN [MAMINA - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Ratolojanahary, F.E. [Auteur]
Yu, J.G. [Auteur]
Raherison, A. [Auteur]
Zidouh, H. [Auteur]
Carlier, Julien [Auteur]
Gryba, Tadeusz [Auteur]

Titre de la manifestation scientifique :

International Conference on Complex Systems, ICCS'12

Ville :

Agadir

Pays :

Maroc

Date de début de la manifestation scientifique :

2012

Date de publication :

2012

Mot(s)-clé(s) en anglais :

Legendre polynomial
Hollow and solid cylinders
Normalized frequencies
Field profiles
Anisotropic material

Discipline(s) HAL :

Sciences de l'ingénieur [physics]

Résumé en anglais : [en]

The frequency spectrum of a piezoelectric hollow resonator cylinder is studied by using Legendre polynomials. Formulation is given that allows to take into account the electric source. Normal frequencies and electric input ...
Lire la suite >The frequency spectrum of a piezoelectric hollow resonator cylinder is studied by using Legendre polynomials. Formulation is given that allows to take into account the electric source. Normal frequencies and electric input impedance are obtained easily regardless of the type of modes, thickness extensional (TE), thickness shear (TS), edge (E) or radial (R). These quantities are calculated as a function of the diameter to thickness ratio and the results are compared against other calculations from an analytical approach. The numerical results for harmonic and modal analyses such as normalized electric input impedance, the resonance and antiresonance frequencies are presented and compared with the analytical results in order to check the accuracy and range of applicability of the proposed approach. Agreement is obtained.Lire moins >

Langue :

Anglais

Comité de lecture :

Oui

Audience :

Non spécifiée

Vulgarisation :

Non

Collections :

• Institut d'Électronique, de Microélectronique et de Nanotechnologie (IEMN) - UMR 8520

Source :

Harvested from HAL