Spectroscopic study of an Ar-H2O discharge ...
Type de document :
Communication dans un congrès avec actes
Titre :
Spectroscopic study of an Ar-H2O discharge excited by a RF helical cavity
Auteur(s) :
Annusova, Adriana [Auteur]
Comenius University in Bratislava
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Krištof, Jaroslav [Auteur]
Comenius University in Bratislava
Veis, Pavel [Auteur]
Comenius University in Bratislava
Foissac, Corinne [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Supiot, Philippe [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Comenius University in Bratislava
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Krištof, Jaroslav [Auteur]
Comenius University in Bratislava
Veis, Pavel [Auteur]
Comenius University in Bratislava
Foissac, Corinne [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Supiot, Philippe [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Titre de la manifestation scientifique :
21th Annual Conference of Doctoral Students, WDS 2012
Ville :
Prague
Pays :
République tchèque
Date de début de la manifestation scientifique :
2012-05-29
Titre de l’ouvrage :
Proceedings of 21th Annual Conference of Doctoral Students, WDS 2012
Date de publication :
2012
Discipline(s) HAL :
Sciences de l'ingénieur [physics]
Résumé en anglais : [en]
This paper deals with a spectroscopic characterization of an Ar-H2O discharge excited by a helical cavity at 27 MHz. The power and the pressure are fixed to 30 W and 266 Pa, respectively. Emissions from Ar, H, O atoms and ...
Lire la suite >This paper deals with a spectroscopic characterization of an Ar-H2O discharge excited by a helical cavity at 27 MHz. The power and the pressure are fixed to 30 W and 266 Pa, respectively. Emissions from Ar, H, O atoms and the OH(A2Σ+→X2Π) molecular spectral system are studied spatially along the discharge as a function of gas composition. Besides, weak emission of the second positive system of N2 coming from impurities is also detected. Conclusions are made about the possible role of argon and nitrogen metastable states in the excitation mechanism of the main emitting species. In addition to this, the characteristic temperatures are determined.Lire moins >
Lire la suite >This paper deals with a spectroscopic characterization of an Ar-H2O discharge excited by a helical cavity at 27 MHz. The power and the pressure are fixed to 30 W and 266 Pa, respectively. Emissions from Ar, H, O atoms and the OH(A2Σ+→X2Π) molecular spectral system are studied spatially along the discharge as a function of gas composition. Besides, weak emission of the second positive system of N2 coming from impurities is also detected. Conclusions are made about the possible role of argon and nitrogen metastable states in the excitation mechanism of the main emitting species. In addition to this, the characteristic temperatures are determined.Lire moins >
Langue :
Anglais
Comité de lecture :
Oui
Audience :
Non spécifiée
Vulgarisation :
Non
Source :