Design of silicon-pTMDS bio-MEMS with ...
Type de document :
Communication dans un congrès avec actes
Titre :
Design of silicon-pTMDS bio-MEMS with millimeter and sub-millimeter waves transducers
Auteur(s) :
Mille, Vianney [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
BOURZGUI, Nour-Eddine [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Medjdoub, Farid [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Bocquet, Bertrand [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
BOURZGUI, Nour-Eddine [Auteur]

Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Medjdoub, Farid [Auteur]

Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Bocquet, Bertrand [Auteur]

Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Titre de la manifestation scientifique :
34th European Microwave Conference, EuMC 2004
Ville :
Amsterdam
Pays :
Pays-Bas
Date de début de la manifestation scientifique :
2004-10-12
Titre de l’ouvrage :
Proceedings of the 34th European Microwave Conference, EuMC 2004
Éditeur :
Horizon House Publications Ltd, London, UK
Date de publication :
2004
Discipline(s) HAL :
Sciences de l'ingénieur [physics]
Résumé en anglais : [en]
Biosensors allow investigating complex media with many applications in biology, environment and food processing. But new constraints in terms of sensitivity, real-time measurement and life time lead to new designs. ...
Lire la suite >Biosensors allow investigating complex media with many applications in biology, environment and food processing. But new constraints in terms of sensitivity, real-time measurement and life time lead to new designs. Microfluidic and microsystems technologies can bring interesting solutions. We present here a new technological method for the microfabrication of such biosensors, called hioMEMS, based on the deposition of a polymer on a silicon substrate by “cold” RPECVD. Moreover, this structure is well suitable for the deposition of planar waveguide up to the THz frequencies. We try to develop a transduction function based on the dielectric spectroscopy of biomolecnles and we present some experimental results obtained up to 2ZOGHz with an on-wafer vectorial network analyzer.Lire moins >
Lire la suite >Biosensors allow investigating complex media with many applications in biology, environment and food processing. But new constraints in terms of sensitivity, real-time measurement and life time lead to new designs. Microfluidic and microsystems technologies can bring interesting solutions. We present here a new technological method for the microfabrication of such biosensors, called hioMEMS, based on the deposition of a polymer on a silicon substrate by “cold” RPECVD. Moreover, this structure is well suitable for the deposition of planar waveguide up to the THz frequencies. We try to develop a transduction function based on the dielectric spectroscopy of biomolecnles and we present some experimental results obtained up to 2ZOGHz with an on-wafer vectorial network analyzer.Lire moins >
Langue :
Anglais
Comité de lecture :
Oui
Audience :
Internationale
Vulgarisation :
Non
Source :