Adhesive forces investigation on a silicon tip by contact mode atomic force microscope

Agache, Vincent; Legrand, Bernard; Collard, Dominique; Buchaillot, Lionel

Type de document :

Compte-rendu et recension critique d'ouvrage

DOI :

10.1063/1.1508806

Titre :

Adhesive forces investigation on a silicon tip by contact mode atomic force microscope

Auteur(s) :

Agache, Vincent [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Legrand, Bernard [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Collard, Dominique [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Buchaillot, Lionel [Auteur]

Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]

Titre de la revue :

Applied Physics Letters

Pagination :

2623-2625

Éditeur :

American Institute of Physics

Date de publication :

2002

ISSN :

0003-6951

Discipline(s) HAL :

Sciences de l'ingénieur [physics]

Résumé en anglais : [en]

An atomic force microscope operating in contact mode is used in this letter for probing the adhesive forces at the apex of a silicon nanotip with typical radius smaller than 15 nm, fabricated using a combination of ...
Lire la suite >An atomic force microscope operating in contact mode is used in this letter for probing the adhesive forces at the apex of a silicon nanotip with typical radius smaller than 15 nm, fabricated using a combination of high-resolution electron beam lithography and plasma dry etching. The amplitude of the forces is deduced from force versus distance curve measurements. By determining the contact point and the pull-off force from the force curves, the surface topography and the adhesive forces are simultaneously obtained at various locations on the surface. This letter reports both measurements and modeling of adhesive forces versus the contact point on the nanotip. As the nanotip is sharper and has a smaller aperture angle than the employed atomic force microscope tip, the measurements are focused on the nanotip apexLire moins >

Langue :

Anglais

Vulgarisation :

Non

Collections :

Institut d'Électronique, de Microélectronique et de Nanotechnologie (IEMN) - UMR 8520

Source :

Harvested from HAL

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