RF blade nano-electromechanical resonator ...
Document type :
Communication dans un congrès avec actes
Title :
RF blade nano-electromechanical resonator with self-aligned process for definition of lateral electrostatic transducers
Author(s) :
Agache, Vincent [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Laboratory for Integrated Micro Mechatronics Systems [LIMMS]
Legrand, Bernard [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Collard, Dominique [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Fujita, Hiroyuki [Auteur]
Buchaillot, Lionel [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Laboratory for Integrated Micro Mechatronics Systems [LIMMS]
Legrand, Bernard [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Collard, Dominique [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Fujita, Hiroyuki [Auteur]
Buchaillot, Lionel [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Conference title :
Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2005
City :
Montreux
Country :
Suisse
Start date of the conference :
2005
Book title :
Proceedings of the 2005 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2005
Publisher :
IEEE, Piscataway, NJ, USA
Publication date :
2005
HAL domain(s) :
Sciences de l'ingénieur [physics]
English abstract : [en]
In this paper, the design, fabrication, and characterization of a new class of electromechanical resonator based on a blade geometry is proposed. This particular geometry allows self-alignment of the mechanical resonator ...
Show more >In this paper, the design, fabrication, and characterization of a new class of electromechanical resonator based on a blade geometry is proposed. This particular geometry allows self-alignment of the mechanical resonator to its lateral electrodes with nanometer scale lateral gap (<50 nm), while achieving high eigenfrequencies in the GHz range for lateral flexural solicitation. Using an electromechanical amplitude modulation setup, a fundamental resonance frequency at 1.12 GHz has been extracted with a quality factor of 180, and its first harmonic has been measured at 2.5 GHz associated with a quality factor of 62Show less >
Show more >In this paper, the design, fabrication, and characterization of a new class of electromechanical resonator based on a blade geometry is proposed. This particular geometry allows self-alignment of the mechanical resonator to its lateral electrodes with nanometer scale lateral gap (<50 nm), while achieving high eigenfrequencies in the GHz range for lateral flexural solicitation. Using an electromechanical amplitude modulation setup, a fundamental resonance frequency at 1.12 GHz has been extracted with a quality factor of 180, and its first harmonic has been measured at 2.5 GHz associated with a quality factor of 62Show less >
Language :
Anglais
Peer reviewed article :
Oui
Audience :
Non spécifiée
Popular science :
Non
Source :