Characterization of vertical vibration of ...
Type de document :
Communication dans un congrès avec actes
Titre :
Characterization of vertical vibration of electrostatically actuated resonators using Atomic Force Microscope in noncontact mode
Auteur(s) :
Agache, Vincent [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Legrand, Bernard [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Nakamura, K. [Auteur]
Kawakatsu, H. [Auteur]
Buchaillot, Lionel [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Toshiyoshi, Hiroshi [Auteur]
Collard, Dominique [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Fujita, Hiroyuki [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Legrand, Bernard [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Nakamura, K. [Auteur]
Kawakatsu, H. [Auteur]
Buchaillot, Lionel [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Toshiyoshi, Hiroshi [Auteur]
Collard, Dominique [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Fujita, Hiroyuki [Auteur]
Titre de la manifestation scientifique :
The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005
Ville :
Seoul
Pays :
Corée du Sud
Date de début de la manifestation scientifique :
2005-06-05
Titre de l’ouvrage :
Proceedings of the 13th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS'05
Éditeur :
IEEE, Piscataway, NJ, USA
Date de publication :
2005
Mot(s)-clé(s) en anglais :
Atomic force microscopy
Vibrations
Resonant frequency
Dynamic voltage scaling
Electrostatics
Transducers
Amplitude estimation
Motion estimation
Oscillators
Resonator filters
Vibrations
Resonant frequency
Dynamic voltage scaling
Electrostatics
Transducers
Amplitude estimation
Motion estimation
Oscillators
Resonator filters
Discipline(s) HAL :
Sciences de l'ingénieur [physics]
Résumé en anglais : [en]
Non contact mode atomic force microscope (AFM) direct characterization of out-of-plane fixed-fixed high frequency microelectromechanical resonators is examined while applying the excitation voltage to integrated electrostatic ...
Lire la suite >Non contact mode atomic force microscope (AFM) direct characterization of out-of-plane fixed-fixed high frequency microelectromechanical resonators is examined while applying the excitation voltage to integrated electrostatic transducers. Non contact mode is rather used than contact mode in order to alleviate the dynamic mechanical coupling between the resonator and the cantilever occurring in the second case. Moreover, with this technique, sub-nanometer scale mechanical vibrations are sensed at operation frequencies in the MHz range. Additionally, this method is suitable in order to estimate the amplitude of vibrations of the resonator according to its excitation level signal and predict the motional resistance of the resonator, key parameter in case it would be integrated as a reference oscillator or a microelectromechanical filter in a more complex radio-frequency transceiver architectureLire moins >
Lire la suite >Non contact mode atomic force microscope (AFM) direct characterization of out-of-plane fixed-fixed high frequency microelectromechanical resonators is examined while applying the excitation voltage to integrated electrostatic transducers. Non contact mode is rather used than contact mode in order to alleviate the dynamic mechanical coupling between the resonator and the cantilever occurring in the second case. Moreover, with this technique, sub-nanometer scale mechanical vibrations are sensed at operation frequencies in the MHz range. Additionally, this method is suitable in order to estimate the amplitude of vibrations of the resonator according to its excitation level signal and predict the motional resistance of the resonator, key parameter in case it would be integrated as a reference oscillator or a microelectromechanical filter in a more complex radio-frequency transceiver architectureLire moins >
Langue :
Anglais
Comité de lecture :
Oui
Audience :
Non spécifiée
Vulgarisation :
Non
Source :