Title :

Modeling of a PZT5A MEMS resonator disc partially metallized: Annular metallization

Author(s) :

Naciri, Ismail [Auteur]
Rguiti, Abdessamad [Auteur]
Elmaimouni, Lahoucine [Auteur]
Lefebvre, Jean-Etienne [Auteur]
Matériaux et Acoustiques pour MIcro et NAno systèmes intégrés - IEMN [MAMINA - IEMN]
Ratolojanahary, Faniry Emilson [Auteur]
Belkassmi, Youssef [Auteur]
Krit, Salahddine [Auteur]
Rguiti, Mohamed [Auteur]
Laboratoire des Matériaux Céramiques et Procédés Associés - EA 2443 [LMCPA]
Gryba, Tadeusz [Auteur]
Matériaux et Acoustiques pour MIcro et NAno systèmes intégrés - IEMN [MAMINA - IEMN]

Conference title :

2017 International Conference on Engineering & MIS (ICEMIS)

City :

Monastir

Country :

Tunisie

Start date of the conference :

2017-05-08

Publisher :

IEEE

English keyword(s) :

"Resonant frequency"
"Micromechanical devices"
"Mathematical model"
"Metallization"
"Electrodes"
"Vibrations"
"Manganese"

HAL domain(s) :

Sciences de l'ingénieur [physics]
Sciences de l'ingénieur [physics]/Micro et nanotechnologies/Microélectronique
Sciences de l'ingénieur [physics]/Matériaux
Sciences de l'ingénieur [physics]/Acoustique [physics.class-ph]

English abstract : [en]

An extension of the orthogonal polynomial approach in order to solve wave propagation in a MEMS resonator disc in the case of annular metallization is reported in the following paper. The disc is made from PZT5A and has ...
Show more >An extension of the orthogonal polynomial approach in order to solve wave propagation in a MEMS resonator disc in the case of annular metallization is reported in the following paper. The disc is made from PZT5A and has been divided into two areas, the outer one with electrodes and the inner without electrodes. The formulation is based on expressing different displacement components by means of Legendre polynomials series and harmonic functions for solving the goverening equation of motion and Maxwell equations in the system of cylindrical coordinates. Alternating source and boundary conditions are directly incorporated into the governing equations. The electro-acoustic behavior of the MEMS resonator concern of presenting the resonant and anti-resonant frequencies, the electrical input admittance and the field of axial and radial mechanical displacement components. Obtained results are compared with those reported in the literature, good agreement was proved.Show less >

Language :

Anglais

Peer reviewed article :

Oui

Audience :

Internationale

Popular science :

Non

Collections :

• Institut d'Électronique, de Microélectronique et de Nanotechnologie (IEMN) - UMR 8520

Source :

Harvested from HAL