Titre :

Piezoelectric Micromachined Ultrasonic Transducers with Center Support Membrane

Auteur(s) :

Wang, Yan [Auteur]
State Key Laboratory of ASIC and System
Xu, Wei Jiang [Auteur]
INSA Institut National des Sciences Appliquées Hauts-de-France [INSA Hauts-De-France]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Transduction, Propagation et Imagerie Acoustique - IEMN [TPIA - IEMN]
He, Leming [Auteur]
State Key Laboratory of ASIC and System
Ren, Junyan [Auteur]
State Key Laboratory of ASIC and System

Titre de la manifestation scientifique :

2022 IEEE 16th International Conference on Solid-State & Integrated Circuit Technology (ICSICT)

Ville :

Nangjing

Pays :

Chine

Date de début de la manifestation scientifique :

2022-10-25

Éditeur :

IEEE

Discipline(s) HAL :

Sciences de l'ingénieur [physics]

Résumé en anglais : [en]

We present a piezoelectric micromachined ultrasonic transducers (pMUTs) with center support membrane. A finite element model has been created in COMSOL Multiphysics. Its vibration membrane is connected with other structures ...
Lire la suite >We present a piezoelectric micromachined ultrasonic transducers (pMUTs) with center support membrane. A finite element model has been created in COMSOL Multiphysics. Its vibration membrane is connected with other structures only through the central support column or wall. Since the outer edge of the membrane is not clamped, the membrane can have large vibration amplitude. Compared with the traditional clamped pMUTs, this center support structure has a larger average vibration amplitude and higher electromechanical coupling coefficient. According to the simulation results, the pMUTs with center support have an order of magnitude larger average vibration amplitude than traditional pMUTs with clamped circular and rectangular membranes. Besides, their electromechanical coupling factor k2t are 0.5808% and 0.4185%, which is also ahead of the traditional ones. The structure proposed in this paper has significant advantages in ultrasound emission and energy conversion efficiency, and is conducive to various airborne applications.Lire moins >

Langue :

Anglais

Comité de lecture :

Oui

Audience :

Internationale

Vulgarisation :

Non

Collections :

• Institut d'Électronique, de Microélectronique et de Nanotechnologie (IEMN) - UMR 8520

Source :

Harvested from HAL