Fabricating Silicon Resonators for Analysing ...
Document type :
Compte-rendu et recension critique d'ouvrage: Autre communication scientifique (congrès sans actes - poster - séminaire...)
DOI :
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Title :
Fabricating Silicon Resonators for Analysing Biological Samples
Author(s) :
Kumemura, Momoko [Auteur]
The University of Tokyo [UTokyo]
Pekin, Deniz [Auteur]
Centre de Recherche Paul Pascal [CRPP]
Menon, Vivek Anand [Auteur]
Gunma University
Van Seuningen, Isabelle [Auteur]
Hétérogénéité, Plasticité et Résistance aux Thérapies des Cancers = Cancer Heterogeneity, Plasticity and Resistance to Therapies - UMR 9020 - U 1277 [CANTHER]
Collard, Dominique [Auteur]
Laboratory for Integrated Micro Mechatronics Systems [LIMMS]
Tarhan, Mehmet-Cagatay [Auteur]
Bio-Micro-Electro-Mechanical Systems - IEMN [BIOMEMS - IEMN]
JUNIA [JUNIA]
Laboratory for Integrated Micro Mechatronics Systems [LIMMS]
The University of Tokyo [UTokyo]
Pekin, Deniz [Auteur]
Centre de Recherche Paul Pascal [CRPP]
Menon, Vivek Anand [Auteur]
Gunma University
Van Seuningen, Isabelle [Auteur]
Hétérogénéité, Plasticité et Résistance aux Thérapies des Cancers = Cancer Heterogeneity, Plasticity and Resistance to Therapies - UMR 9020 - U 1277 [CANTHER]
Collard, Dominique [Auteur]
Laboratory for Integrated Micro Mechatronics Systems [LIMMS]
Tarhan, Mehmet-Cagatay [Auteur]
Bio-Micro-Electro-Mechanical Systems - IEMN [BIOMEMS - IEMN]
JUNIA [JUNIA]
Laboratory for Integrated Micro Mechatronics Systems [LIMMS]
Journal title :
Micromachines
Pages :
1546
Publisher :
MDPI
Publication date :
2021
ISSN :
2072-666X
English keyword(s) :
silicon
microelectromechanical systems
resonators
fabrication
biological applications
microelectromechanical systems
resonators
fabrication
biological applications
HAL domain(s) :
Sciences de l'ingénieur [physics]/Micro et nanotechnologies/Microélectronique
English abstract : [en]
The adaptability of microscale devices allows microtechnologies to be used for a wide range of applications. Biology and medicine are among those fields that, in recent decades, have applied microtechnologies to achieve ...
Show more >The adaptability of microscale devices allows microtechnologies to be used for a wide range of applications. Biology and medicine are among those fields that, in recent decades, have applied microtechnologies to achieve new and improved functionality. However, despite their ability to achieve assay sensitivities that rival or exceed conventional standards, silicon-based microelectromechanical systems remain underutilised for biological and biomedical applications. Although microelectromechanical resonators and actuators do not always exhibit optimal performance in liquid due to electrical double layer formation and high damping, these issues have been solved with some innovative fabrication processes or alternative experimental approaches. This paper focuses on several examples of silicon-based resonating devices with a brief look at their fundamental sensing elements and key fabrication steps, as well as current and potential biological/biomedical applications.Show less >
Show more >The adaptability of microscale devices allows microtechnologies to be used for a wide range of applications. Biology and medicine are among those fields that, in recent decades, have applied microtechnologies to achieve new and improved functionality. However, despite their ability to achieve assay sensitivities that rival or exceed conventional standards, silicon-based microelectromechanical systems remain underutilised for biological and biomedical applications. Although microelectromechanical resonators and actuators do not always exhibit optimal performance in liquid due to electrical double layer formation and high damping, these issues have been solved with some innovative fabrication processes or alternative experimental approaches. This paper focuses on several examples of silicon-based resonating devices with a brief look at their fundamental sensing elements and key fabrication steps, as well as current and potential biological/biomedical applications.Show less >
Language :
Anglais
Popular science :
Non
Source :
Submission date :
2024-02-17T03:30:48Z
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