Fabricating Silicon Resonators for Analysing ...

Document type :
Compte-rendu et recension critique d'ouvrage: Autre communication scientifique (congrès sans actes - poster - séminaire...)
DOI :
10.3390/mi12121546
Permalink :
http://hdl.handle.net/20.500.12210/107944
Title :
Fabricating Silicon Resonators for Analysing Biological Samples
Author(s) :
Kumemura, Momoko [Auteur]
The University of Tokyo [UTokyo]
Pekin, Deniz [Auteur] refId
Centre de Recherche Paul Pascal [CRPP]
Menon, Vivek Anand [Auteur]
Gunma University
Van Seuningen, Isabelle [Auteur] refId
Hétérogénéité, Plasticité et Résistance aux Thérapies des Cancers = Cancer Heterogeneity, Plasticity and Resistance to Therapies - UMR 9020 - U 1277 [CANTHER]
Collard, Dominique [Auteur] refId
Laboratory for Integrated Micro Mechatronics Systems [LIMMS]
Tarhan, Mehmet-Cagatay [Auteur]
Bio-Micro-Electro-Mechanical Systems - IEMN [BIOMEMS - IEMN]
JUNIA [JUNIA]
Laboratory for Integrated Micro Mechatronics Systems [LIMMS]
Journal title :
Micromachines
Pages :
1546
Publisher :
MDPI
Publication date :
2021
ISSN :
2072-666X
English keyword(s) :
silicon
microelectromechanical systems
resonators
fabrication
biological applications
HAL domain(s) :
Sciences de l'ingénieur [physics]/Micro et nanotechnologies/Microélectronique
English abstract : [en]
The adaptability of microscale devices allows microtechnologies to be used for a wide range of applications. Biology and medicine are among those fields that, in recent decades, have applied microtechnologies to achieve ...
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Language :
Anglais
Popular science :
Non
Collections :
Source :
Harvested from HAL
Submission date :
2024-02-17T03:30:48Z
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