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Résultats 81-87 de 87
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Determination by indentation method of sputtered PZT films mechanical parameters for Si-MEMs applications
2005, Integrated Ferroelectrics, 69, Gordon & Breach, The Netherlands, 2005Communication dans un congrès avec actes -
Dry etchnig of PZT thin films for bilayer actuator realization
2005, Integrated Ferroelectrics, 69, Gordon & Breach, The Netherlands, 2005Communication dans un congrès avec actes -
Actuation and sensing integration challenges at the microscale : the Gordian Knot of the resonant bioMEMS realm
64th IEEE International Frequency Control Symposium, FCS 2010, 2010, Proceedings of the 64th IEEE International Frequency Control Symposium, FCS 2010, 2010Communication dans un congrès avec actes -
Silicon-based micromembranes with piezoelectric actuation and piezoresistive detection for sensing purposes in liquid media
Journal of Micromechanics and Microengineering, IOP Publishing, 2010, 20, 075014-1-8Compte-rendu et recension critique d'ouvragetexte intégral -
Comparison of the tunability performances and loss factor up to 60 GHz of some ferroelectric materials : BST and doped BST, PST, hetero structures BST/BZN
Joint 20th IEEE International Symposium on Applications of Ferroelectrics and 2011 International Symposium on Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials, ISAF-PFM-2011, Vancouver, 2011 -
Extended Lamb's model application to high-order resonances of micromachined circular membranes with integrated actuation and sensing capabilities
IEEE Sensors Conference, Waikoloa, HI, 2010, Proceedings of 2010 IEEE Sensors Conference, 2010Communication dans un congrès avec actes -
Top electrode size effect on hysteresis loops in piezoresponse force microscopy ofPb(Zr,Ti)O3-film on silicon structures
Journal of Applied Physics, American Institute of Physics, 2012, 112, 052015-1-7Compte-rendu et recension critique d'ouvragetexte intégral