Titre :

Multimodal microscopy test standard for scanning microwave, electron, force and optical microscopy

Auteur(s) :

Haenssler, Olaf C. [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Wieghaus, M. F. [Auteur]
Kostopoulos, A. [Auteur]
Doundoulakis, G. [Auteur]
Aperathitis, E. [Auteur]
Fatikow, S. [Auteur]
Kiriakidis, G. [Auteur]

Titre de la revue :

Journal of Micro-Bio Robotics

Pagination :

51-57

Éditeur :

Springer

Date de publication :

2018

ISSN :

2194-6418

Discipline(s) HAL :

Sciences de l'ingénieur [physics]

Résumé en anglais : [en]

We report on measurement results of a test standard suitable for different microscopic modalities. These findings were obtained by a multimodal hybrid microscope, which requires various calibration methods, also in terms ...
Lire la suite >We report on measurement results of a test standard suitable for different microscopic modalities. These findings were obtained by a multimodal hybrid microscope, which requires various calibration methods, also in terms of its further use as a tool in a nanorobotic environment. A Scanning Probe Microscopy (SPM)-Controller based on an FPGA (Field Programmable Gate Array) enables the submicrometer imaging for atomic force and microwave microscopic modalities. It is embedded in an open source software framework for nanorobotics and -automation and is described in this report.Lire moins >

Langue :

Anglais

Vulgarisation :

Non

Collections :

• Institut d'Électronique, de Microélectronique et de Nanotechnologie (IEMN) - UMR 8520

Source :

Harvested from HAL