[Invited] Picosecond acoustics: from lab to fab
Document type :
Autre communication scientifique (congrès sans actes - poster - séminaire...): Communication dans un congrès avec actes: Conférence invitée
Title :
[Invited] Picosecond acoustics: from lab to fab
Author(s) :
Devos, Arnaud [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Physique - IEMN [PHYSIQUE - IEMN]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Physique - IEMN [PHYSIQUE - IEMN]
Conference title :
8th International School of Sound and Light, SEL 2022
City :
Saint-Pierre d'Oléron
Country :
France
Start date of the conference :
2022-09-12
English keyword(s) :
picosecond acoustics
thickness control
thin-film
elasticity
adhesion
RF filters
thickness control
thin-film
elasticity
adhesion
RF filters
HAL domain(s) :
Sciences de l'ingénieur [physics]
English abstract : [en]
The main goal of this lecture is to give an outlook of the numerous and various applications that the picosecond acoustic technique has met in the industrial world. The story started a few years after its invention by Prof. ...
Show more >The main goal of this lecture is to give an outlook of the numerous and various applications that the picosecond acoustic technique has met in the industrial world. The story started a few years after its invention by Prof. H. Maris. Indeed, Rudolph Technologies (now ONTO) rapidly realized that such a technique was the missing one in the industrial world for controlling the thickness of thin metal films. That was the beginning of the Metapulse® story, a full automatized tool dedicated to microelectronics applications and that can be found in any production company worthy of the name. More recently, picosecond acoustics and especially its variant based on laser-tuning, the so-called Colored Picosecond Acoustics or APiC, have been shown to be very useful for many other industrial applications in topics as different as space mirror, radio-frequency filtering, flat and smart glass, solar cells,…Show less >
Show more >The main goal of this lecture is to give an outlook of the numerous and various applications that the picosecond acoustic technique has met in the industrial world. The story started a few years after its invention by Prof. H. Maris. Indeed, Rudolph Technologies (now ONTO) rapidly realized that such a technique was the missing one in the industrial world for controlling the thickness of thin metal films. That was the beginning of the Metapulse® story, a full automatized tool dedicated to microelectronics applications and that can be found in any production company worthy of the name. More recently, picosecond acoustics and especially its variant based on laser-tuning, the so-called Colored Picosecond Acoustics or APiC, have been shown to be very useful for many other industrial applications in topics as different as space mirror, radio-frequency filtering, flat and smart glass, solar cells,…Show less >
Language :
Anglais
Peer reviewed article :
Non
Audience :
Internationale
Popular science :
Non
Source :