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Electronic scheme for multiplexed dynamic behavior excitation and detection of piezoelectric silicon-based micromembranes
Institute of Electrical and Electronics Engineers, 2008Autre communication scientifique (congrès sans actes - poster - séminaire...) -
Study of nano-domains by piezoresponse force microscopy of relaxor PMN-PT thin films : influence of the annealing temperature, film thickness and composition
European Materials Research Society Spring Meeting, E-MRS Spring 2009, Symposium H : Synthesis, Processing and Characterization of Nanoscale Multi Functional Oxide Films II, Strasbourg, 2009 -
Determination by indentation method of sputtered PZT films mechanical parameters for Si-MEMS applications
2004, Séoul, Corée, ISIF 2004, 2004Communication dans un congrès avec actes -
Sur la signification des valeurs du module d'Young déterminé par nanoindentation dans le cas des matériaux ferroélectriques
2004, Besançon, France, 17-18 novembre, Journée Matières Ferroélectriques, 2004Communication dans un congrès avec actes -
Comparison of the tunability performances and loss factor up to 60 GHz of some ferroelectric materials : BST and doped BST, PST, hetero structures BST/BZN
Joint 20th IEEE International Symposium on Applications of Ferroelectrics and 2011 International Symposium on Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials, ISAF-PFM-2011, Vancouver, 2011 -
Lead-free bismuth aluminate (BiAlO3) thin films : structural and electrical properties
Joint 20th IEEE International Symposium on Applications of Ferroelectrics and 2011 International Symposium on Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials, ISAF-PFM-2011, Vancouver, 2011 -
Extended Lamb's model application to high-order resonances of micromachined circular membranes with integrated actuation and sensing capabilities
IEEE Sensors Conference, Waikoloa, HI, 2010, Proceedings of 2010 IEEE Sensors Conference, 2010Communication dans un congrès avec actes -
PZT films etched by focused Ga3+ ion beam : studies of ion damage and post annealing treatment effects
International Symposium on Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials, PFM 2009, Aveiro, 2009 -
Actuation and sensing integration challenges at the microscale : the Gordian Knot of the resonant bioMEMS realm
64th IEEE International Frequency Control Symposium, FCS 2010, 2010, Proceedings of the 64th IEEE International Frequency Control Symposium, FCS 2010, 2010Communication dans un congrès avec actes -
Integrative technology-based approach of microelectromechanical systems (MEMS) for biosensing applications
34th Annual International Conference of the IEEE Engineering in Medicine and Biology Society, EMBC 2012, San Diego, CA, 2012, Proceedings of 34th Annual International Conference of the IEEE Engineering in Medicine and Biology Society, EMBC 2012, 2012Communication dans un congrès avec actes