Recherche
Résultats 1-10 de 87
-
Integrative Technology-Based Approach of Microelectromechanical Systems (MEMS) for Biosensing Applications
EMBC'12, San Diego, 2012, EMBC'12, 2012Communication dans un congrès avec actes -
PZT Nanofilm-Based Wafer Scale Nanoresonators
IEEE Frequency Control Symposium, Denver, 12-04-2015, 04-2015Communication dans un congrès avec actestexte intégral -
Actuation and sensing integration challenges at the microscale: the Gordian Knot of the resonant BioMEMS realm
2010 IEEE International Frequency Control Symposium, San Francisco, 2010Communication dans un congrès avec actes -
«Nanostructures piézoélectriques fabriquées par faisceau d’ions Ga+ focalisés sur couches minces»
Journée d’échange Fédération Chevreul-IEMN –, Villeneuve d’Ascq, 07-03-2013, 2013Autre communication scientifique (congrès sans actes - poster - séminaire...) -
Study of Ni2-Mn-Ga phase formation by magnetron sputtering film deposition at low temperature onto Si substrates and LaNiO3/Pb(Ti,Zr)O3 buffer
Journal of Vacuum Science & Technology A, American Vacuum Society, 2010, 28, 6-10Compte-rendu et recension critique d'ouvrage -
Piezoelectric thin films for MEMS applications - A comparative study of PZT, 0.7PMN-0.3PT and 0.9PMN-0.1PT thin films grown on Si by r.f. magnetron sputtering
Sensors and Actuators A: Physical, Elsevier, 2008, 148, 122-128Compte-rendu et recension critique d'ouvragetexte intégral -
Lead-zirconate titanate (PZT) nanoscale patterning by ultraviolet-based lithography lift-off technique for nano-electromechanical systems applications
Joint 20th IEEE International Symposium on Applications of Ferroelectrics and 2011 International Symposium on Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials, ISAF-PFM-2011, Vancouver, 2011, Proceedings of Joint 20th IEEE International Symposium on Applications of Ferroelectrics and 2011 International Symposium on Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials, ISAF-PFM-2011, 2011Communication dans un congrès avec actes -
Complex permittivity and tunable performance of BST thin film up to 60 GHz
Sino-French Workshop, Shanghai, 2009 -
Piezoelectric properties of sputtered PZT films: influence of structure, microstructure, film thickness, (Zr,Ti) ratio and Nb substitution
European Materials Research Society Spring Meeting, Symposium P, Advanced Materials for Microelectronics : Ferroelectrics and Low-k Dielectrics, 2002, Materials Science in Semiconductor Processing, 5, Elsevier, 2002Communication dans un congrès avec actes -
Fabrication of nanostructured piezoelectric thin films by FIB and nanoscale characterization by piezoresponse force microscopy
European Materials Research Society Spring Meeting, E-MRS Spring 2011, Symposium D : Synthesis, processing and characterization of nanoscale multi functional oxide films III, Nice, 2011